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Method for simply preparing multi-band near-field enhanced composite nano antenna

A nano-antenna and near-field enhancement technology, applied in the direction of ion implantation plating, coating, radiating element structure, etc., can solve the problems of processing samples, large beam energy loss, etc.

Active Publication Date: 2021-06-08
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

These processing methods all need the help of external conditions, such as changing the wavelength to use optical parametric amplifier (OPA) or β-phase barium metaborate (BBO) crystal, and the energy loss of the beam obtained is relatively large, which requires a strong original beam supply; and changing The processing environment may have an impact on the processed sample itself

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  • Method for simply preparing multi-band near-field enhanced composite nano antenna
  • Method for simply preparing multi-band near-field enhanced composite nano antenna
  • Method for simply preparing multi-band near-field enhanced composite nano antenna

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0025] A simple method for preparing a multi-band near-field enhanced composite nano-antenna, the specific processing schematic diagram is as follows figure 1 Shown:

[0026] Step 1: Prepare a single crystal silicon sample 1 of 10mm*10mm*1mm, ultrasonically clean the silicon substrate with anhydrous ethanol, and plate a layer of metal Cr with a thickness of 5nm on its surface as an adhesion layer by vacuum magnetron sputtering. The target material 3 is then bombarded with a 50nm-thick Au film 2, where the metal film can be any metal that can excite surface plasmons after interacting with the femtosecond laser, preferably Au or Ag.

[0027] Step 2: Adjust the optical path of femtosecond laser processing so that the laser is obliquely incident on the single-point processing pre-order structure

[0028] (1) Adjust the last reflector that the femtosecond ...

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Abstract

The invention relates to a method for simply preparing a multi-band near-field enhanced composite nano antenna, and belongs to the technical field of laser processing application. Single-point processing is carried out through oblique incidence focusing femtosecond laser, follow-up pulse dislocation processing is regulated and controlled, the offset direction is adjusted, the micro-nano grating structure can be manufactured by simply controlling the femtosecond laser and changing the period of the micro-nano grating structure without the help of additional conditions by utilizing the arbitrariness of the included angle between the edge of the preorder structure and the femtosecond laser, and then, focusing processing is performed by using an objective lens to obtain nano jet particles to prepare the composite nano antenna capable of performing near-field enhancement in multiple wavebands. According to the method, the limitation of single near-field enhancement wave band of the nano antenna at present is solved, the method for preparing the micro-nano grating and changing the period of the micro-nano grating through femtosecond laser oblique incidence dislocation single-point processing is simple and easy to implement, the influence of a liquid environment or other processing environments on a sample is avoided, and the method can be widely applied to the fields of optical communication, sensing, nano photoelectric devices and the like.

Description

technical field [0001] The invention relates to a simple method for preparing a multi-band near-field enhanced composite nano-antenna, which belongs to the technical field of laser processing applications. Background technique [0002] Optical nanoantennas can localize, regulate and enhance far-field optical radiation in the nanoscale band. The formation of such local "hot spots" can significantly improve the performance of optoelectronic devices, which has attracted extensive research by scholars in the field of nanophotonics. As the simplest nano-antenna, metal nanoparticles can collect and confine electromagnetic energy by generating surface plasmons after receiving incident electromagnetic waves, but their enhancement effect on far-field electromagnetic waves is very limited. Therefore, some scholars have proposed to combine the micro-nano grating structure with light diffraction and unique polarization characteristics with metal nanoparticles to make composite nano-ante...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01Q1/38C23C14/16C23C14/35C23C14/58
CPCH01Q1/38C23C14/35C23C14/165C23C14/5873
Inventor 姜澜王飞飞孙靖雅
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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