Method for simply preparing multi-band near-field enhanced composite nano antenna
A nano-antenna and near-field enhancement technology, applied in the direction of ion implantation plating, coating, radiating element structure, etc., can solve the problems of processing samples, large beam energy loss, etc.
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[0024] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0025] A simple method for preparing a multi-band near-field enhanced composite nano-antenna, the specific processing schematic diagram is as follows figure 1 Shown:
[0026] Step 1: Prepare a single crystal silicon sample 1 of 10mm*10mm*1mm, ultrasonically clean the silicon substrate with anhydrous ethanol, and plate a layer of metal Cr with a thickness of 5nm on its surface as an adhesion layer by vacuum magnetron sputtering. The target material 3 is then bombarded with a 50nm-thick Au film 2, where the metal film can be any metal that can excite surface plasmons after interacting with the femtosecond laser, preferably Au or Ag.
[0027] Step 2: Adjust the optical path of femtosecond laser processing so that the laser is obliquely incident on the single-point processing pre-order structure
[0028] (1) Adjust the last reflector that the femtosecond ...
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