A method and system for enhancing bandwidth of superharmonic synchronization based on parametric pump

Abstract

The invention discloses a superharmonic synchronous bandwidth enhancement method and system based on a parameter pump. The inertial sensing module includes a low-frequency sensitive beam module and a high-frequency synchronous beam module, and a low-frequency resonant beam and a high-frequency synchronous beam module in the low-frequency sensitive beam module. The high-frequency resonant beams are arranged side by side and mechanically connected by a shared mechanical micro-beam. The low-frequency sensitive beam and the high-frequency synchronous beam are respectively placed in the first oscillation circuit and the second oscillation circuit to generate self-excited oscillation; the parameter pump module includes a parameter pump Signal generator, the parameter pump signal generator is connected with the inertia sensor module through the adder, the parameter pump signal generator outputs the dynamic stiffness modulation signal of the parameter pump at a fixed frequency after the low-frequency resonant beam and the high-frequency synchronous beam respectively generate closed-loop oscillation , to achieve the stiffness modulation of the oscillator. The detection range, scale factor, ease of realization, flexibility, measurement accuracy and resolution of the super-harmonic synchronous inertial sensor of the invention are significantly improved.

Description

technical field [0001] The invention belongs to the technical field of micromechanical systems and nonlinear dynamics, and in particular relates to a method and system for enhancing a superharmonic synchronous bandwidth based on a parameter pump. Background technique [0002] High-precision MEMS inertial sensors, due to low cost, reliable performance and high integration brought about by miniaturization, have been widely used in military and industrial fields, such as inertial guidance, national defense military industry, energy exploration, earthquake detection and intelligent interactive robots, etc. . Due to its high sensitivity, wide dynamic range and quasi-digital output, MEMS resonant accelerometers have gradually become a research hotspot in the field of micro-accelerometers. At present, foreign practical resonant accelerometers are embargoed to our country, while our resonant accelerometers are still in the laboratory stage. With the continuous development of the c...

AI Technical Summary

Problems solved by technology

Although the existing resonant accelerometer based on the super-harmonic synchronous effect can achieve several times the scale factor when the synchronous phenomenon occurs, the mismatch of the resonant frequency and the frequency in the synchronous phenomenon caused by the design and manufacturing errors of micro-nano devices Due to the small lock bandwidth, it is very difficult to generate synchronization

At the same time, the smaller genlock interval also limits the range of acceleration measurement, and the larger acceleration value will cause the synchronized oscillators to break away from the genlock state and oscillate independently, which will not achieve the sensitivity amplification effect of superharmonic synchronization.

Moreover, since the structural parameters of the synchronous oscillator cannot be changed after processing, the size of the synchronous interval cannot be flexibly controlled by adjusting the coupling strength, which limits the further expansion of the acceleration detection range

Strict frequency matching requirements of synchronous effects and the difficulty of expanding the acceleration detection range greatly limit the practical application of ultra-harmonic synchronous accelerometers

Images