Photovoltaic cell two-way air inlet passivation deposition device

Abstract

The invention discloses a photovoltaic cell two-way air inlet passivation deposition device. The photovoltaic cell two-way air inlet passivation deposition device is provided with a main machine chamber, at least one process chamber is arranged in the main machine chamber, one end of the process chamber is a furnace opening end, the other end of the process chamber is a closed furnace tail end, and a first air inlet is formed in the position, close to the furnace opening end, of the process chamber. A first air outlet is formed in the position, close to the furnace opening end, of the process chamber, a second air inlet is formed in the position, close to the furnace tail end, of the process chamber, and a second air outlet is formed in the position, close to the furnace tail end or the furnace tail, of the process chamber. According to the photovoltaic cell two-way air inlet passivation deposition device, an aluminum oxide film is grown in a two-way alternate air inlet mode, the uniformity of the aluminum oxide film can be greatly improved, the uniformity of the aluminum oxide film under a pyramid suede structure can further be controlled within 3%, the higher field passivation effect of the aluminum oxide film can be exerted, Auger recombination, SRH recombination and surface recombination are reduced, and the passivation effect is greatly improved.

Description

technical field [0001] The invention relates to the technical field of photovoltaic solar cells, in particular to a bidirectional gas-intake passivation deposition device for photovoltaic cells applied in the surface deposition of photovoltaic solar cells. Background technique [0002] A photovoltaic solar cell is a semiconductor material that converts the sun's light energy directly into electrical energy. Silicon photovoltaic cells based on silicon are commonly used at present, including monocrystalline silicon, polycrystalline silicon, amorphous silicon, crystalline silicon and compound laminated photovoltaic cells, etc. PERT battery (Passivated Emitter and Rear Totally-diffused Cell, passivated emitter rear fully diffused cell), PERC battery (Passivated Emitter and Rear Cell, emitter and rear passivation technology) are new photovoltaic cell technologies, PERT and PERC The biggest difference between the battery and conventional batteries is that the dielectric film on t...

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Problems solved by technology

[0004] Aiming at the defects of poor uniformity of the aluminum oxide film on the pyramid suede structure existing in the above-mentioned existing ALD passivation equipment, the applicant provides a photovoltaic cell two-way gas-intake passivation deposition device, which improves the The uniformity of the aluminum oxide film layer solves the problems of pores caused by uneven aluminum oxide film, field-free passivation, high energy consumption, EL black spots, EL black spots, etc., and can be used for double-sided passivation of silicon wafers application

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