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Droplet jetting device and related method

A droplet ejection and droplet technology, which is applied to ejection devices, liquid ejection devices, etc., can solve the problems of inability to guarantee droplet ejection efficiency, unstable droplet ejection direction, and difficulty in droplet ejection effect, etc. Droplet ejection performance, the effect of ensuring droplet ejection efficiency and stable droplet ejection direction

Active Publication Date: 2021-06-08
HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the existence of the Rayleigh angle, the technology of using Rayleigh surface acoustic waves to realize droplet ejection in the prior art is poor in applicability. When using a single row of Rayleigh surface acoustic waves to drive the liquid, it is difficult to achieve a droplet perpendicular to the direction of the piezoelectric chip. Injection effect, the droplet injection direction is unstable, the droplet injection efficiency cannot be guaranteed, and the droplet injection performance is poor

Method used

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  • Droplet jetting device and related method
  • Droplet jetting device and related method
  • Droplet jetting device and related method

Examples

Experimental program
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Effect test

Embodiment 1

[0048] For a droplet ejection device provided in Embodiment 1 of the present disclosure, refer to figure 1 As shown, it includes: a piezoelectric chip 1, an interdigital transducer 2 arranged on the upper surface of the piezoelectric chip 1;

[0049] The ratio of the thickness of the piezoelectric chip 1 to the period of the interdigital transducer 2 is 1-3;

[0050] The interdigital transducer 1 is driven by a radio frequency signal to excite surface acoustic waves and bulk acoustic waves in the piezoelectric chip, and the surface acoustic waves and bulk acoustic waves are reflected on the upper surface 11 and the lower surface 12 of the piezoelectric chip 2 to form a composite Acoustic waves are used to drive the liquid to be driven on the liquid attachment area to stretch along the direction perpendicular to the surface of the piezoelectric chip to form a liquid column, so that the liquid column will have a droplet pinch-off effect at the end, and a single droplet will be e...

Embodiment 2

[0109] Based on the same inventive concept, an embodiment of the present disclosure also provides a method for manufacturing the droplet ejection device in the first embodiment above, including:

[0110] The interdigital transducer is evaporated on a surface of the piezoelectric chip, and the ratio of the thickness of the piezoelectric chip to the period of the interdigital transducer is 1-3.

[0111] In a specific embodiment, the preparation method of the droplet ejection device may specifically include the following steps:

[0112] (1) Lithium niobate (LiNbO 3 ) a polished surface of the piezoelectric chip 1 is vapor-deposited with an interdigital electrode metal film to obtain an interdigital transducer 2; and the ratio of the thickness h of the piezoelectric chip 1 to the period λ of the interdigital transducer 2 is 1 to 3 ;

[0113] (2) sputtering passivation layer film 3 on the surface of the interdigital electrode 21 and the bus electrode 22 area of ​​the interdigital...

Embodiment 3

[0127] Based on the same inventive concept, an embodiment of the present disclosure also provides a droplet ejection method using any of the aforementioned droplet ejection devices, including:

[0128] delivering one or more liquids to be driven to the liquid attachment area; the liquid attachment area is located on the upper surface and / or lower surface of the piezoelectric chip 1 corresponding to the acoustic surface generated by the interdigital transducer 2 The area covered by waves propagating along the surface of the piezoelectric chip;

[0129] A radio frequency signal is applied to the interdigital transducer 2, and surface acoustic waves and bulk acoustic waves are excited in the piezoelectric chip 1, and the surface acoustic waves and bulk acoustic waves are reflected on the upper and lower surfaces of the piezoelectric chip 1 to form composite acoustic waves, driving The liquid to be driven is stretched in a direction perpendicular to the surface of the piezoelectri...

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Abstract

The invention provides a droplet jetting device and a related method. The droplet jetting device comprises a piezoelectric chip and an interdigital transducer arranged on the upper surface of the piezoelectric chip, the ratio of the thickness of the piezoelectric chip to the period of the interdigital transducer is 1-3, the interdigital transducer is driven by a radio frequency signal to excite surface acoustic waves and bulk acoustic waves in the piezoelectric chip, and the surface acoustic waves and the bulk acoustic waves are reflected on the upper surface and the lower surface of the piezoelectric chip to generate composite acoustic waves so as to drive to-be-driven liquid on a liquid attachment area to stretch in the direction perpendicular to the surface of the piezoelectric chip to form a liquid column, so that the liquid column generates a liquid drop pinch-off effect at the end part, and a single liquid drop is ejected, the liquid attachment area is located on the upper surface and / or the lower surface of the piezoelectric chip and corresponds to the area covered by the surface acoustic wave generated by the interdigital transducer propagating along the surface of the piezoelectric chip. The problems that a device is complex in structure, high in cost, low in efficiency and inconvenient to achieve on-demand jetting are solved.

Description

technical field [0001] The invention relates to the field of acoustic wave device microfluidic technology, in particular to a microdrop ejection device and a related method. Background technique [0002] The Drop on Demand (DOD) droplet ejection technology can precisely control the particle size and ejection speed of the ejected droplets according to the demand, and is widely used in inkjet printing, biomedicine, material molding, microelectronic packaging, and microelectronic machinery manufacturing. , genetic engineering and other fields have a wide range of applications. At present, droplet ejection devices for on-demand ejection mainly include piezoelectric, thermal bubble, pneumatic, mechanical, electromagnetic, etc. according to the driving mode. Forces liquid to eject from a nozzle or orifice in the form of droplets. [0003] In recent years, a new droplet ejection technology using surface acoustic wave has emerged, among which, the most widely used is the droplet e...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05B17/06
CPCB05B17/0607B05B17/0653
Inventor 雷芋琳胡泓韩俊茏
Owner HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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