Electronic grade chlorine trifluoride purification system and temperature difference power control method thereof

Abstract

The invention provides an electronic grade chlorine trifluoride purification system and a temperature difference power control method. The purification system comprises a first hastelloy condenser, a first hastelloy heating tank body, a hastelloy pressure-resistant heating tank body, a three-stage metal adsorbent layer bed, a two-stage low-temperature rectification device, a liquefaction tank body and a pressure stabilization tank body which are connected in sequence, wherein the feeding end of the first hastelloy condenser is arranged at the top end of the first hastelloy condenser and is communicated with the reactor, and the discharging end of the first hastelloy condenser is arranged at the bottom end of the first hastelloy condenser and is connected with the feeding end of the first hastelloy heating tank body; and the first hastelloy condenser is used for condensing a chlorine trifluoride crude product generated by the reactor, so that power is provided for gas at an outlet of the reactor through temperature difference.

Description

Technical field[0001]The present invention relates to a purification system of electronic grade trifluoride and a temperature difference power control method thereof.Background technique[0002]At present, although there is a process synthesis method of industrial grade trifluorine chloride, electronic grade trifluoride is not prepared. In order to solve the problem of "card neck" in my country's chip manufacturing, the development of electronic grade trifluoride has become a heavy weight. During the preparation process of the electronic grade trifluoride, a plurality of flow units require positive pressure, and the rectification is an essential link. A certain power is required before the distillation system, due to the oxidation resistance of the trifluoride itself, there is no supercharged equipment in the market, so that invented a safe pressurization method can solve the power of trifluorinated chloride gas. problem.Inventive content[0003]The present invention provides a purifica...

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Problems solved by technology

A certain amount of power needs to be provided before the rectification system. Due to the oxidation of chlorine trifluoride itself, there is no booster equipment for chlorine trifluoride on the market. Therefore, it is necessary to invent a safe booster method to solve the power of chlorine trifluoride gas. question

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