Device for adjusting angle of sample table of vacuum equipment

Abstract

The invention discloses a device for adjusting an angle of a sample table of vacuum equipment. The device comprises a bottom plate flange; a fixing rod; a coupling connected with the other end of the fixed rod, and the coupling is connected with the sample table; a support frame; a support flange; a screw rod flange; a sliding block arranged on the screw rod flange, and the sliding block is connected with a screw rod; a motor arranged on the support flange, and a rotating shaft of the motor is connected with one end of the screw rod; a corrugated pipe arranged on the lower surface of the bottom plate flange, and the corrugated pipe is coaxially connected with the screw rod flange; and a connecting rod, wherein one end of the connecting rod is connected with the corrugated pipe, and the other end of the connecting rod is connected with the sample table, so that the technical effects that the angle is adjusted under the condition that the vacuum condition in a cavity is not damaged, pollution caused by cavity opening is reduced, the angle is automatically adjusted, the angle adjusting accuracy is high, and the automation level of equipment is improved are achieved.

Description

technical field [0001] The invention relates to the technical field of microelectronics, in particular to a device for adjusting the angle of a vacuum equipment sample stage. Background technique [0002] Vacuum equipment is a device that generates, improves and (or) maintains vacuum, including vacuum application equipment and vacuum acquisition equipment. At present, vacuum equipment is developing rapidly and widely used in the field of microelectronics, which puts forward higher requirements for vacuum structure design. [0003] Due to the opening of the chamber in the prior art to manually adjust the angle of the vacuum equipment, the vacuum environment in the chamber is destroyed, the chamber is polluted, the working time is increased, and the production efficiency is reduced. Contents of the invention [0004] The embodiment of the present invention provides a device for adjusting the angle of the sample stage of the vacuum equipment, which is used to solve the probl...

AI Technical Summary

Problems solved by technology

[0004] The embodiment of the present invention provides a device for adjusting the angle of the sample stage of the vacuum equipment, which is used to solve the problem of manually adjusting the angle of the vacuum equipment by opening the cavity in the prior art, causing damage to the vacuum environment in the chamber, causing pollution in the chamber, and increasing the working time. The technical problem of reducing production efficiency has realized the angle adjustment without destroying the vacuum in the chamber, reducing the pollution caused by the opening of the chamber, achieving automatic angle adjustment, high accuracy of angle adjustment, and improving the technical effect of equipment automation level

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