Micromechanical detection structure and MEMS inertial measurement device

Abstract

The invention provides a micromechanical detection structure and an MEMS inertial measurement device, and belongs to the technical field of MEMS devices. The micromechanical detection structure comprises a central anchor point, a connecting beam, a vibration mass, a fixed electrode and a movable electrode, wherein the central anchor point is fixedly arranged on a substrate, one end of the connecting beam is fixedly connected with the central anchor point, and the other end of the connecting beam extends out of the outer side of the central anchor point; the vibration mass is of a frame-shaped structure and is located on the periphery of the central anchor point, the vibration mass is connected with the extending end of the connecting beam through an elastic element, the expected deformation direction of the elastic element is parallel to the sensitive shaft, the fixed electrode is fixedly arranged on the substrate, and the movable electrode is fixedly connected to the vibration mass. The movable electrode is adjacent to the fixed electrode and forms a capacitor unit with the fixed electrode, and the movable electrode moves along with the vibration mass, so that the distance between the movable electrode and the fixed electrode is changed. According to the micro-mechanical detection structure and the MEMS inertial measurement device provided by the invention, the technical problem of cross acceleration error of the existing single-axis MEMS inertial measurement device can be greatly improved and reduced.

Description

technical field [0001] The invention belongs to the technical field of MEMS devices, and more specifically relates to a micromechanical detection structure and a MEMS inertial measurement device. Background technique [0002] MEMS stands for Micro-Electro-Mechanical System, which is a science based on microelectronics, micromechanics and material science to research, design and manufacture micro-devices with specific functions. MEMS devices have a series of advantages such as small size, light weight, and high reliability, and because their processing technology is compatible with traditional integrated circuit technology to a certain extent, it is easy to achieve mass production, so it can be widely produced and applied. [0003] MEMS capacitive acceleration sensors include micro-mechanical detection structures and signal conditioning circuits. The micromechanical detection structure includes vibration mass and detection electrodes. When acceleration is input, the vibratio...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a micro-mechanical detection structure and MEMS inertial measurement device, which aims to greatly improve and reduce the technical problem of cross acceleration error existing in the existing single-axis MEMS inertial measurement device

Images