Method for centrifugally binding ITO rotating target

Abstract

The invention discloses a method for centrifugally binding an ITO (Indium Tin Oxide) rotating target, and belongs to the technical field of ITO rotating target processing. The method comprises the following steps of: S1, pretreatment: carrying out metallization treatment on the inner walls of ITO target tubes and the outer surface of a back tube; S2, assembling: inserting the back tube downwards from the upper part of an electric heating pipe to insert the back tube into an insertion groove in the top surface of a mounting base and insert a positioning cylinder on the mounting base into the back tube, sleeving the back tube with a single ITO target tube, inserting the ITO target tube into the insertion groove in the top surface of the mounting base, and forming a gap between the ITO target tube and the back tube; and S3, indium filling and binding: gradually binding the single ITO target tubes from bottom to top. According to the method, through rotating centrifugation, molten indium is tightly attached to the inner walls of the ITO target tubes, and the binding rate is high.

Description

technical field [0001] The invention relates to the technical field of ITO rotating target processing, more specifically, it relates to a method for centrifugally binding an ITO rotating target. Background technique [0002] The rotating target is a magnetron target, which is mainly used in solar cells, architectural glass, automotive glass, semiconductors, flat-panel TVs and other fields. The target is cylindrical and contains a stationary magnet that rotates at a slow speed. ITO is an N-type oxide semiconductor-indium tin oxide. As a nano-indium tin metal oxide, it has good conductivity and transparency, and can cut off harmful electron radiation, ultraviolet rays and far infrared rays that are harmful to the human body. Therefore, indium tin oxide is usually sprayed on glass, plastic and electronic display screens, used as a transparent conductive film, and at the same time reduces harmful electron radiation and ultraviolet and infrared radiation. [0003] Since the rot...

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Problems solved by technology

[0003] Since the rotating target is in the shape of a cylinder and is placed outside the back tube, the gap between the two is not large, so it is difficult to perfuse indium in the gap, which will easily cause gaps and the binding rate is not stable enough.

On the other hand, liquid indium is easy to produce oxides during the flow, and these oxides are sandwiched in the indium layer, which will cause an increase in resistance, and local overheating and other problems are prone to occur during use.

It also affects the combination and binding rate between the two

In the binding of the rotating target, it is difficult to clean the oxide in the gap

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