Variable-range capacitive flexible pressure sensor and production method thereof

A pressure sensor and capacitive technology, applied in the field of flexible sensors and intelligent fluids, can solve the problems of high sensitivity and wide linear range that are difficult to achieve at the same time

Active Publication Date: 2021-05-18
WUHAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, due to the fixed range of existing flexible pressure sensors, it is difficult to achieve high sensitivity and wide linear range at the same time

Method used

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  • Variable-range capacitive flexible pressure sensor and production method thereof
  • Variable-range capacitive flexible pressure sensor and production method thereof
  • Variable-range capacitive flexible pressure sensor and production method thereof

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preparation example Construction

[0029] The variable-range capacitive flexible pressure sensor provided by the present invention (the structural schematic diagram sees figure 1 ), which includes an upper electrode layer 1, a flexible thin film layer 2, a flexible cavity 3 and a lower electrode layer 5 arranged in sequence from top to bottom, wherein the flexible cavity 3 is filled with an electrorheological medium 4; its preparation method includes the following steps (see flow chart figure 2 ):

[0030] 1) The flexible film layer 2 is prepared by a printing process;

[0031] 2) preparing an electrode layer 1 on the flexible film layer by using a deposition process;

[0032] 3) Prepare the flexible cavity 3 with through holes 301 at both ends by using the 3D printing method or the template method, and paste the flexible cavity 3 under the flexible film layer 2;

[0033] 4) Prepare a layer of electrode layer 5 under the flexible cavity 3 by using a deposition process;

[0034] 5) Inject the electrorheolog...

Embodiment 1

[0038] A variable-range capacitive flexible pressure sensor, the preparation method of which comprises the steps of:

[0039] 1) Evenly coat polydimethylsiloxane on a flat substrate, and cure at 60°C for 30 minutes to form a polydimethylsiloxane flexible film layer with a thickness of 200um (which can withstand 200% strain) ,Such as figure 2 a) as shown;

[0040] 2) Deposit a layer of copper film (thickness is 0.02mm) on the polydimethylsiloxane flexible film layer by sputtering process, as the upper electrode layer, such as figure 2 b) shown;

[0041] 3) Use Solidworks software to design the flexible cavity model, import the designed model into the photo-curing printer, and print the flexible compound (flexible photo-curing resin elastic) into a flexible cavity structure according to the designed model printer, clean and dry it with ultraviolet rays The flexible cavity was further cured for 20 minutes; after coating a layer of polydimethylsiloxane solution on the surface...

Embodiment 2

[0045] A variable-range capacitive flexible pressure sensor, the preparation method of which comprises the steps of:

[0046] 1) Evenly coat polydimethylsiloxane on a flat substrate, and cure at 60°C for 30 minutes to form a polydimethylsiloxane flexible film layer with a thickness of 200um;

[0047] 2) Deposit a copper film (0.02 mm in thickness) on the polydimethylsiloxane flexible film layer by sputtering process as the upper electrode layer;

[0048] 3) Use Solidworks software to design the mold model of the flexible cavity, import the designed model into the light-curing printer, and print the plastic compound (plastic light-curing resin clear) into the mold structure of the flexible cavity according to the designed model printer, after cleaning and drying Use ultraviolet light to further cure the mold for 20 minutes; inject polydimethylsiloxane into the mold after curing and heat-cure at 60°C for 30 minutes and then peel off to obtain a flexible cavity; polydimethylsilox...

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Abstract

The invention discloses a variable-range capacitive flexible pressure sensor which comprises a lower electrode layer, a flexible cavity, a flexible film layer and an upper electrode layer which are sequentially arranged from bottom to top, and the flexible cavity is filled with an electrorheological medium layer. According to the invention, the combination of the capacitor and the flexible structure filled with the electrorheological medium is proposed for the first time, the electrorheological medium layer is arranged between the two movable electrodes of the capacitor, and the mechanical characteristics of the electrorheological medium layer are adjusted through an external electric field so that the deformation generated by the movable electrodes of the flexible capacitor under the condition of the same external force is changed; and the pressure-capacitance characteristic between two electrode plates is adjusted by means of the influence on the stress deformation of a flexible film so that the adjustment of the pressure detection range of the sensor is realized. The pressure sensor obtained by the invention can effectively consider high sensitivity and a wide linear range, and has important research and application significance for promoting the development of the flexible pressure sensor.

Description

technical field [0001] The invention belongs to the technical field of intelligent fluids and flexible sensors, and specifically discloses a variable-range capacitive flexible pressure sensor and a preparation method thereof. Background technique [0002] As a new type of pressure sensor, the flexible pressure sensor has the characteristics of thinness, portability, good flexibility, and can detect the pressure between complex curved surfaces and special contact surfaces. It can be applied to human motion detection, health diagnosis, smart clothing, electronic skin, automobile industry, Man-machine interface, mobile communication and other fields. The flexible pressure sensor can deform under a certain pressure, and output a corresponding electrical signal according to the magnitude of the deformation. Compared with traditional hard silicon-based sensors, flexible pressure sensors have flexible functional characteristics such as bending, stretching, and torsion. The flexib...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/14
CPCG01L1/148Y02P10/25
Inventor 刘锋雷骁吴伟光马丽筠郭宣啟李世峰
Owner WUHAN UNIV
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