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HJT battery based on double-layer transparent conductive oxide film and preparation method of HJT battery

An oxide thin film, transparent conductive technology, applied in circuits, photovoltaic power generation, electrical components, etc., can solve problems such as low battery conversion efficiency, and achieve the effect of improving yield and preparation efficiency, reducing sputtering damage, and high conversion efficiency.

Pending Publication Date: 2021-04-27
HUNAN RED SUN PHOTOELECTRICITY SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] However, the currently used TCO layer cannot meet these requirements well, resulting in low conversion efficiency of the battery

Method used

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  • HJT battery based on double-layer transparent conductive oxide film and preparation method of HJT battery
  • HJT battery based on double-layer transparent conductive oxide film and preparation method of HJT battery

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Embodiment 1

[0035] A method for preparing an HJT battery based on a double-layer transparent conductive oxide film, comprising the following steps:

[0036] S1. Prepare an intrinsic amorphous silicon layer 2 on the light-receiving surface and the backlight surface of the N-type silicon wafer 1 respectively.

[0037] S2. Prepare an N-type doped amorphous silicon layer 3 and a P-type doped amorphous silicon layer 4 sequentially on the intrinsic amorphous silicon layer 2 on the light-receiving surface and the backlight surface of the N-type silicon wafer 1 .

[0038] S3. Prepare the first transparent conductive oxide layer 5 on the N-type doped amorphous silicon layer 3 and the P-type doped amorphous silicon layer 4 by using a DC magnetron sputtering process, wherein the process parameters of the DC magnetron sputtering process It is: the pressure is 0.5Pa, the deposition temperature is 100°C, the target is ITO (97:3), the gas introduced into the process is argon and oxygen, the flow rate of a...

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Abstract

The invention discloses an HJT battery based on a double-layer transparent conductive oxide film and a preparation method of the HJT battery. The preparation method comprises the step of sequentially preparing an intrinsic amorphous silicon layer, an N-type doped amorphous silicon layer, a P-type doped amorphous silicon layer, a first transparent conductive oxide layer, a second transparent conductive oxide layer and a metal gate line electrode on a light receiving surface and a backlight surface of an N-type silicon wafer respectively. According to the invention, the auxiliary anode added in the magnetron sputtering process can change the electromagnetic field of the magnetron sputtering system and improve the ionization efficiency of argon and the plasma density of the system, the transparent conductive oxide film with good conductivity is obtained, and the film can absorb stray electrons and reduce the temperature rise and sputtering damage of the substrate, so that the yield and the preparation efficiency of the battery are improved, and the HJT battery with low cost and high conversion efficiency is finally obtained. The preparation method can be completed in different cavities of the same magnetron sputtering device, and the yield and the preparation efficiency of the battery are further improved.

Description

technical field [0001] The invention belongs to the field of solar cells, and relates to an HJT battery and a preparation method thereof, in particular to an HJT battery based on a double-layer transparent conductive oxide film and a preparation method thereof. Background technique [0002] Silicon heterojunction solar cell (HJT cell) is a double-sided light-receiving heterojunction solar cell. It has the characteristics of low production process temperature, high conversion efficiency, low temperature coefficient, and double-sided power generation. It is currently a commercial product with high cost performance. High-efficiency solar cells with high technical difficulty. In recent years, it has attracted much attention and has become one of the main development directions of solar cells. [0003] In the development of solar cells, the transparent conductive oxide (TCO) film plays a vital role. The TCO film is used as an anti-reflection layer and a conductive layer for late...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0747H01L31/0224H01L31/18H01L31/20
CPCH01L31/0747H01L31/022425H01L31/022466H01L31/1884H01L31/202Y02E10/50Y02P70/50
Inventor 张威彭宜昌李斌周奇瑞
Owner HUNAN RED SUN PHOTOELECTRICITY SCI & TECH
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