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Method for improving performance of AlCrN coating cutter through in-situ high-energy Ar < + > etching aftertreatment

A coating, high-energy technology, applied in the direction of coating, metal material coating process, ion implantation plating, etc., can solve the problems of reducing the overall performance of the coating, increasing the friction resistance, increasing the surface roughness of the coating, etc.

Active Publication Date: 2021-04-27
ANHUI UNIVERSITY OF TECHNOLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Particles of different sizes on the coating surface increase the roughness of the coating surface and reduce the overall performance of the coating, which in turn leads to an increase in the frictional resistance when the tool surface interacts with the workpiece

Method used

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  • Method for improving performance of AlCrN coating cutter through in-situ high-energy Ar &lt; + &gt; etching aftertreatment
  • Method for improving performance of AlCrN coating cutter through in-situ high-energy Ar &lt; + &gt; etching aftertreatment
  • Method for improving performance of AlCrN coating cutter through in-situ high-energy Ar &lt; + &gt; etching aftertreatment

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0044] M42 high-speed steel specimens and M42 high-speed steel straight shank end mills with a diameter of 10 mm were selected for the test. The test uses two symmetrically distributed AlCr (atomic ratio Al:Cr=70:30, purity 99.5%) alloy targets. Before coating, use high-energy Ar + Bombarding the surface of the substrate, that is, etching and cleaning the surface of the substrate, the current is 90A, the time is 30min; when coating, the temperature is 450℃, N 2 Pressure 4.0*10 -2 The mbar and AlCr alloy target currents are all 130A, and the deposition time is 2 hours.

[0045]The prepared AlCrN coating was tested.

Embodiment 2

[0047] The preparation method of the AlCrN coating is the same as that of the first embodiment.

[0048] The prepared AlCrN coating is subjected to post-treatment again, and the post-treatment steps of in-situ high-energy Ar ion bombardment are as follows:

[0049] In the first step, the vacuum degree in the furnace reaches 2.0x10 -4 At Pa, Ar gas with a purity of 99.999% was introduced and heated to 400°C; in the second step, a cylindrical Ti target was turned on as a traction arc target, and the current during cleaning was controlled to 80A, which excited a large number of electrons. Turn on the circular auxiliary anode target, and form the positive and negative electrode traction electron movement with the Ti target. Electrons collide with Ar gas in the furnace to generate high-density Ar + . The negative bias of the substrate is -200V, attracting Ar + Carry out ion bombardment on the surface of the substrate; in the third step, the bombardment time is 40min.

[0050] ...

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Abstract

The invention discloses a method for improving the performance of an AlCrN coating cutter through in-situ high-energy Ar < + > etching aftertreatment. The method comprises the steps of cleaning a base material; preparing an AlCrN functional coating; depositing the AlCrN functional coating on the treated base material; carrying out in-situ high-energy Ar < + > bombardment aftertreatment; performing in-situ high-energy Ar < + > bombardment aftertreatment on the prepared AlCrN functional coating, namely vacuumizing the base material after deposition coating is finished, keeping the processing temperature at 400 DEG C, and introducing Ar gas; and after cleaning a Ti target is started, starting an anode target material, forming positive and negative poles by the anode target material and the cleaning Ti target to pull electrons to move, enabling the electrons to collide with the Ar gas to generate Ar < + >, controlling the negative bias voltage to be -200 V, attracting the Ar < + > to carry out ion bombardment on the surface of the base material provided with the AlCrN functional coating for 40 min. According to the method, large and small liquid drop particles on the surface of the AlCrN coating can be effectively removed, meanwhile, the residual pressure stress of the coating and a base body is increased, and the surface roughness and the cutting performance of the AlCrN coating are improved.

Description

technical field [0001] The invention relates to the technical field of tool processing technology, in particular to a method for improving the performance of an AlCrN coated tool by in-situ high-energy Ar+ etching post-treatment. Background technique [0002] In the machinery manufacturing industry, although there are many different process forming methods, more than 90% of the mechanical parts are still manufactured by the cutting process. With the development of science and technology, the machining industry has put forward higher requirements for cutting tools. The manufacturing concept of high efficiency, compound and environmental protection has been widely mentioned, and hard coatings have been widely used in cutting tools. According to statistics, more than 80% of the tools use tool coating. Coated tools can significantly improve tool life and cutting efficiency compared to uncoated tools. [0003] Multi-arc ion plating technology is the mainstream technology for pr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/32C23C14/58
CPCC23C14/0641C23C14/325C23C14/5833C23C14/0021
Inventor 蔡飞张世宏方炜郑军张林王启民
Owner ANHUI UNIVERSITY OF TECHNOLOGY
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