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Silicon-based microphone and manufacturing method thereof

A manufacturing method and microphone technology, applied in the field of microphones, can solve problems such as cracks and failure of the outer diaphragm, and achieve the effect of avoiding failure of rupture

Active Publication Date: 2022-06-03
AAC ACOUSTIC TECH (SHENZHEN) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, during the performance test of the silicon-based microphone in the related art, for example, when the air is blown, the outer diaphragm is subjected to a large pressure, which causes cracks to appear on the outer diaphragm during the test, and rupture failure occurs

Method used

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  • Silicon-based microphone and manufacturing method thereof
  • Silicon-based microphone and manufacturing method thereof
  • Silicon-based microphone and manufacturing method thereof

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Embodiment Construction

[0035] see figure 1 , is a schematic cross-sectional structure diagram of the silicon-based microphone provided by the embodiment of the present invention.

[0036] Embodiments of the present invention provide a silicon-based microphone and a manufacturing method thereof. like figure 1 The shown silicon-based microphone 1 includes a silicon substrate 10 , an insulating layer 20 , a diaphragm 30 and a back plate 40 that are stacked in sequence. The silicon-based microphone 1 further includes a backplate electrode 50 disposed on the side of the backplate facing the diaphragm.

[0037] The silicon substrate 10 is used to carry the insulating layer 20 , the diaphragm 30 and the back plate 40 . The silicon substrate 10 includes a back cavity 101 .

[0038] The insulating layer 20 is disposed on the silicon substrate 10 . The insulating layer 20 can be made of silicon oxide material. Specifically, the insulating layer 20 is disposed between the silicon substrate 10 and the vib...

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PUM

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Abstract

The present invention provides a silicon-based microphone, comprising a silicon substrate with a cavity back, a diaphragm and a back plate arranged above the silicon substrate, the diaphragm includes an inner diaphragm and an outer periphery of the inner diaphragm and is connected to the The outer diaphragm with the inner diaphragm arranged at intervals is characterized in that the back plate includes a back plate support fixedly connected to the outer diaphragm, a back plate supported by the back plate support and located above the back cavity The plate intermediate body and the resisting column extending from the back plate intermediate body toward the diaphragm, when the diaphragm vibrates, the outer diaphragm can be deformed to interfere with the resisting post. The silicon-based microphone of the invention has the advantage that the outer diaphragm is not easily broken under the action of loud pressure.

Description

【Technical field】 [0001] The present invention relates to a microphone, in particular to a silicon-based microphone. 【Background technique】 [0002] With the development of wireless communication, there are more and more mobile phone users around the world, and users are not only satisfied with calls, but also need to be able to provide high-quality call effects. Especially with the development of mobile multimedia technology, mobile phones The call quality of the mobile phone is more important. The microphone of the mobile phone is used as the voice pickup device of the mobile phone, and its design directly affects the call quality. At present, a microphone with more applications and better performance is a Micro-Electro-Mechanical-System Microphone, also known as a silicon-based microphone. Its package volume is smaller than the traditional electret microphone, and its sensitivity is also higher, and its application is more and more widely. [0003] However, during perfo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H04R19/04H04R19/00H04R31/00H04R7/04H04R7/16
Inventor 钟晓辉王琳琳屠兰兰
Owner AAC ACOUSTIC TECH (SHENZHEN) CO LTD
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