Scanning electron microscope sample navigation method
A scanning electron microscope and navigation method technology, which is applied in the field of scanning electron microscope sample navigation, can solve the problems that electron microscopes are difficult to realize sample navigation, and achieve the effects of low equipment hardware and software requirements, high navigation accuracy, and good universality
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[0019] In order to solve the problem that it is difficult for old electron microscopes without navigation devices to realize sample navigation, the present invention discloses a scanning electron microscope sample navigation method. First, mark four vertices of a rectangle on the sample stage, and record four marks in the electron microscope Point the coordinate information of the sample stage when the point is in the center of the field of view, and then paste the sample. When pasting the sample, it is necessary to expose the four marking points, and image the sample stage after the sample is pasted directly above the sample stage, and then read the four marking points and The coordinate information of the sample placed in the imaging photo, the coordinate information of the sample position in the scanning electron microscope is calculated by using the change of the coordinate system in mathematics, and finally the sample position information is input in the control panel of th...
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