Lamb wave resonator with upper and lower buried electrodes in opposite proportions
A technology of Lamb wave resonators and resonators, which is applied in the radio frequency field of mobile phones, can solve the problems of reducing Q value, stray effect, affecting the performance of resonators, etc., and achieve the effect of reducing frequency temperature coefficient and high Q value
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0043] The present invention will be described in detail below in conjunction with the accompanying drawings, and the features of the present invention will be further revealed in the following detailed description.
[0044] figure 1 It is a schematic diagram of the structure of a surface acoustic wave interdigital transducer (IDT). like figure 1 As shown in , a metal thin film is deposited on the surface of the piezoelectric substrate, and then a set of comb-shaped intersecting metal electrodes is obtained by using the photolithography method in the semiconductor planar process. These metal electrodes shaped like human fingers are arranged to cross each other, and bus bars at both ends are connected together to form two stages of the device, thereby obtaining an interdigital transducer. exist figure 1 In the example of , a total of 6 metal electrodes labeled 1-6 are shown, indicating that the number of interdigital electrodes of this interdigital transducer is 6, and the e...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com