A kind of manufacturing method of micro thermoelectric device
A technology for thermoelectric devices and manufacturing methods, which is applied in the manufacture/processing of thermoelectric devices, semiconductor/solid-state device manufacturing, electric solid-state devices, etc., and can solve the problems of metallization layer pollution, unfavorable welding process, and inaccurate arrangement of thermoelectric particles, etc. , to achieve high-precision assembly and welding, improve performance consistency, and ensure contact accuracy
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[0032] A method for designing a pendulum mold tool for manufacturing a micro thermoelectric device, comprising the following steps:
[0033] 1) The size of the micro thermoelectric device to be fabricated in this example is 8×8mm 2 , a total of 97 pairs of micro thermoelectric particles; design the steel mold drawings according to the requirements of the electrode substrate of the micro thermoelectric device, such as figure 1 and figure 2 shown;
[0034] 2) Use a continuous laser to process a steel mold according to the drawing described in step 1); the steel mold includes a limit plate and an outer frame arranged around the limit plate, and the top surface of the limit plate and the inner side of the outer frame form a concave The groove is used to accommodate the electrode substrate, and a plurality of square through holes are opened on the limiting plate to limit the position of the thermoelectric particles; The groove depth is 0.35mm; the inner diameter of each square ...
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