Gate tube with superlattice-like structure and preparation method thereof
A technology similar to superlattice and gate tube, applied in the field of micro-nano electronics, can solve the problems of low threshold voltage, difficult to meet the requirements of high-performance gate tube, poor temperature and thermal stability, etc.
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[0026] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0027] An embodiment of the present invention provides a gate transistor with a superlattice-like structure, figure 1 It is a structural schematic diagram of a gate tube with a superlattice-like structure provided by an embodiment of the present invention, as shown in figure 1 shown.
[0028] A gate tube with a superlattice-like structure, the gate tube includes a substrate 110, and a first metal electrode layer 120, a superlattice-like layer 130, and a second metal electrode layer 140 sequentially stacked on the substrate 110 , the superlattice-like layer 130 includes n+1 first sublayers 131 and n second sublayers 132 stacked alternately periodically, the material of the first sublayer 131 is GeS or GeSe, and the material of the seco...
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