Quasi-in-situ normal-pressure reaction combination system and imaging method thereof

Abstract

The invention discloses a quasi-in-situ normal-pressure reaction combination system, which comprises a tubular furnace, an imaging device and a vacuum pipeline, wherein the tubular furnace, the vacuumpipeline and the imaging device are sequentially communicated to form a closed sample transfer space, the tubular furnace comprises a quartz tube, a first vacuumizing device and a heating unit, the first vacuumizing device and the heating unit are respectively used for adjusting the pressure and the temperature in the quartz tube, and the vacuumizing range of the first vacuumizing device at leastcomprises the normal pressure and the high vacuum degree with the same magnitude as the vacuum pipeline; and the vacuum pipeline is used for transmitting the sample subjected to normal pressure treatment in the quartz tube to the imaging device at a higher vacuum degree for surface imaging. The sample can be transmitted to the imaging device from the tubular furnace through the ultrahigh vacuum pipeline to be subjected to surface imaging, analysis of an electronic structure and / or a geometric structure and the like on the surface of the sample is completed, different sample treatment environments can be met, the environment requirement for imaging resolution can be guaranteed, and the combination of sample treatment and structural imaging characterization is realized.

Description

technical field [0001] The invention relates to the technical field of surface treatment and detection, in particular to a quasi-in-situ atmospheric pressure reaction combined system and an imaging method thereof. Background technique [0002] Photo-Emission Electron Microscope (PEEM) is a surface imaging technology that was successfully developed in the 1960s and emerged in the 1990s. It uses ultraviolet light or synchrotron X-ray light as the light source, and the light source illuminates the solid surface And excite photoelectrons, after passing through a series of lenses (electromagnetic lens, electrostatic lens), the photoelectrons are collected and projected onto the electronic monitor for imaging. When PEEM is equipped with an electron gun irradiation system, it can be used as a low-energy electron microscope (Low-Energy Electron Microscope, LEEM). It is collected and projected by the subsequent electron optical system. [0003] Except for the different excitation s...

AI Technical Summary

Problems solved by technology

But its ultimate vacuum is only raised to 10 -1 mbar level, and the spatial resolution is significantly reduced, which still cannot meet the requirements of industrial chemical reactions and material preparation under normal or high pressure conditions.

There is a huge pressure gap between the application conditions of PEEM / LEEM and the real reaction and material growth conditions, which limits its application in practical systems

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