Submicron motion platform and motion control method thereof

A motion platform, sub-micron technology, applied in the direction of AC motor control, control system, connection with control/drive circuits, etc., can solve problems such as poor stability, poor motion control accuracy, complex structure, etc., to improve stability and Motion control accuracy and the effect of improving motion stability

Pending Publication Date: 2020-12-18
深圳市圭华智能科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing sub-micron motion platforms still have disadvantages such as complex structure, poor motion control accuracy, and poor stability.

Method used

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  • Submicron motion platform and motion control method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] A sub-micron motion platform comprising a linear motor, an air bearing guide rail, a slider, a grating scale, a granite base plate 1, an X-direction base plate 11, a Y-direction base plate 12, a Z-direction bracket 13 and a drive controller; the linear motor includes X-direction linear motor 2, Y-direction linear motor 3 and Z-direction linear motor 4; the air bearing guide rail includes X-direction air bearing guide rail 5, Y-direction air bearing guide rail 6 and Z-direction air bearing guide rail 7; the slider includes The X-direction slide block 8, the Y-direction slide block 9 and the Z-direction slide block 10, the X-direction slide block 8, the Y-direction slide block 9 and the Z-direction slide block 10 are connected with the X-direction air bearing guide rail 5 and the Y-direction slide rail respectively. The air-floating guide rail 6 is connected to the Z-direction air-floating guide rail 7; the X-direction linear motor 2, the Y-direction linear motor 3 and the...

Embodiment 2

[0034] A sub-micron motion platform, including a linear motor, an air bearing guide rail, a slider, a grating scale, a granite bottom plate 1, an X-direction bottom plate 11, a Y-direction bottom plate 12, a Z-direction bracket 13, a Z-direction operating arm 14 and a drive controller The linear motor includes X-direction linear motor 2, Y-direction linear motor 3 and Z-direction linear motor 4; the air bearing guide rail includes X-direction air bearing guide rail 5, Y-direction air bearing guide rail 6 and Z-direction air bearing guide rail 7 ; The slider includes an X-direction slider 8, a Y-direction slider 9 and a Z-direction slider 10, and the X-direction slider 8, Y-direction slider 9 and Z-direction slider 10 are respectively connected with the X-direction air The floating guide rail 5, the Y-direction air-floating guide rail 6 and the Z-direction air-floating guide rail 7 are connected; the X-direction linear motor 2, the Y-direction linear motor 3 and the Z-direction ...

Embodiment 3

[0037] A motion control method for a submicron-level motion platform. According to the processing procedure of a workpiece, the motion amounts of an X-direction linear motor 2, a Y-direction linear motor 3, and a Z-direction linear motor 4 are set, and the X-direction linear motor is controlled by a drive controller. 2. The Y-direction linear motor 3 and the Z-direction linear motor 4 issue drive commands, the X-direction linear motor 2 receives the drive controller's drive command, drives the X-direction slider 8 to slide on the X-direction air bearing guide rail 5, and the The X-direction bottom plate 11 follows the movement of the X-direction slider 8; the Y-direction linear motor 3 receives the drive command from the drive controller, drives the Y-direction slider 9 to slide on the Y-direction air bearing guide rail 6, and the Y-direction bottom plate 12 follows The Y-direction slider 9 moves; the Z-direction linear motor 4 receives the drive command from the drive controll...

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PUM

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Abstract

The invention relates to the technical field of motor driving, and in particular relates to a submicron motion platform and a motion control method thereof. The submicron motion platform comprises linear motors, air floatation guide rails, a sliding block, a grating ruler, a granite bottom plate, an X-direction bottom plate, a Y-direction bottom plate, a Z-direction support and a driving controller; the linear motors comprise an X-direction linear motor, a Y-direction linear motor and a Z-direction linear motor; the air floatation guide rails comprise an X-direction air floatation guide rail,a Y-direction air floatation guide rail and a Z-direction air floatation guide rail. By adopting the structural design of the linear motors, the air floatation guide rails and the sliding block, the stability and the motion control precision of the motion platform are greatly improved; the X-direction bottom plate and the Y-direction bottom plate are respectively arranged between the X-direction air floatation guide rail and the Y-direction air floatation guide rail, so that the movement stability of the X-direction bottom plate and the Y-direction bottom plate is further improved; due to thedesign of the X-direction linear motor, the Y-direction linear motor and the Z-direction linear motor, precise motion control in the X dimension, the Y dimension and the Z dimension is guaranteed.

Description

technical field [0001] The invention relates to the technical field of motor drive, in particular to a submicron motion platform and a motion control method thereof. Background technique [0002] With the development and promotion of precision machining technology, the machining accuracy and precise control of mechanical manufacturing have become the key to improving the quality and performance of mechanical products. The sub-micron motion platform is a motion control platform used in precision machining and manufacturing, and has been widely used in high-tech fields such as automobile manufacturing, computers, and communication networks. The existing sub-micron motion platforms still have disadvantages such as complex structures, poor motion control precision, and poor stability. Contents of the invention [0003] Aiming at the technical problems in the above-mentioned prior art, the present invention provides a sub-micron motion platform with high stability, high motion...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02K41/02H02K11/33H02K11/22H02P25/06
CPCH02K41/02H02P25/06H02K11/22H02K11/33
Inventor 周建红
Owner 深圳市圭华智能科技有限公司
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