Preparation system and process of electronic-grade ammonia fluoride

Abstract

The invention discloses a preparation system and process of an electronic-grade ammonia fluoride. The preparation system mainly comprises a mixing tank, an evaporator, a mixer and a finished product tank; one side of the mixing tank is connected with a hydrofluoric acid intermediate tank; one side of the evaporator is connected with a liquid ammonia storage tank; the mixer is connected with the evaporator through a filter pipe; a circulating pipe group is connected between the mixer and the mixing tank; and the finished product tank is connected with the mixer. The preparation system providedby the invention is simple in structural composition; complex procedures are orderly and simply materialized, so that complexity is decreased; the systematization of an electronic-grade ammonium fluoride production process is realized, and quantitative production of enterprises under relatively economic conditions is facilitated; and the preparation process provided by the invention is operated onthe basis of adopting the basic support of the main body of the above main structure, so that the whole process is ordered and clear, electronic-grade ammonium fluoride finished products can be prepared in batches, and the advantages of relatively economical cost and relatively high production efficiency can be achieved.

Description

technical field [0001] The invention relates to the technical field of material chemistry, in particular to a preparation system and process of electronic-grade ammonium fluoride. Background technique [0002] Ammonium fluoride is widely used in the field of electronic product production because of its good etching ability. With the rapid development of the electronics industry, the demand for electronic-grade ammonium fluoride is increasing, and the purity requirements for ammonium fluoride are also increasing. At present, there is no mature system and process on the market that can relatively economically and directly produce electronic-grade ammonium fluoride aqueous solution. [0003] In view of this, this application is proposed. Contents of the invention [0004] The first object of the present invention is to provide a preparation system for electronic-grade ammonium fluoride. The preparation system is simple in composition, realizes simplification, and can realize...

AI Technical Summary

Problems solved by technology

[0002] Ammonium fluoride is widely used in the field of electronic product production because of its good etching ability. With the rapid development of the electronics industry, the demand for electronic-grade ammonium fluoride is increasing, and the purity requirements for ammonium fluoride are also increasing. At present, there is no mature system and mature process on the market that can directly produce electronic-grade ammonium fluoride aqueous solution relatively economically

Images