High-integration complete machine device of microscope objective

Abstract

The invention relates to a high-integration complete machine device for a microscope objective. The lower part of a calibrator shell of the device is in threaded connection with the top of a basic imaging objective main body, and a zero adjustment flexible guide ring is embedded in the calibrator shell; piezoelectric drivers are uniformly distributed between the zero adjustment flexible guide ringand a calibration lens; the calibration lens is the first lens at the top end of the microscope objective in a basic imaging objective main body and shares the same optical axis with a basic imagingobjective; a multi-degree-of-freedom flexible guide ring in an accurate adjustment device is arranged in a lens shell at the lower part of a basic imaging objective lens main body, and a radial driveris arranged between the multi-degree-of-freedom flexible guide ring and a core lens group; an axial driver is in threaded connection with a mirror shell, and the top end of the axial driver abuts against the lower end of the multi-degree-of-freedom flexible guide ring. The device is high in integration degree, fine adjustment compensation can be carried out in the assembling and adjusting integration stage, the optical characteristics of the basic imaging body are adjusted in place, accurate positioning can be achieved through assistance of the zero calibrator in the whole machine integrationstage, and the precision loss in the integration stage is reduced to the minimum.

Description

technical field [0001] The invention belongs to the technical field of microscopic objective lenses, and relates to a highly integrated integrated device of a microscopic objective lens. Background technique [0002] As an advanced optical system, microscope objectives are widely used in the fields of biology, metrology, and semiconductor inspection. As human exploration continues to advance to more microscopic fields, there is an increasing demand for microscopic objectives. On the one hand: the objective lens is required to achieve high throughput. High throughput means that the objective lens system needs to have a large field of view, large Numerical aperture, wide spectrum and other characteristics, such as gene sequencing, wafer defect detection and other fields, all put forward high-throughput requirements for microscope objectives. On the other hand: the objective lens is required to achieve high precision, such as microscopic objective lenses used in fields such as...

AI Technical Summary

Problems solved by technology

The third aspect: While ensuring the high-throughput and high-precision characteristics of the objective lens, it must also be cost-effective and suitable for mass production. Therefore, the application field of the above-mentioned advanced optical system can no longer be satisfied with only the basic imaging function. Requirements for high integration of multiple features such as calibratable, easy alignment, and manufacturability

[0004] The existing design method of microscopic objective lens is only aimed at a single module of basic imaging, and usually adopts the method of stacking the lenses in the lens barrel one by one, lacks the adjustment link and the overall planning of the adjustable part, low precision, complex structure, and low integration. Low cost, low cost performance, difficult to apply to high-end precision advanced optical system applications

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