Flexible pressure sensor with convex hemisphere structure and preparation method thereof

Abstract

The invention belongs to the related technical field of flexible sensors, and discloses a flexible pressure sensor with a convex hemisphere structure and a preparation method thereof. The flexible pressure sensor comprises a first electrode substrate, a first electrode, an ionic gel dielectric layer, a second electrode and a second electrode substrate which are arranged from top to bottom, and a convex hemisphere structure with a spine layer and imitating the epidermis of a human body is formed on the surface, away from the second electrode, of the second electrode substrate. According to theinvention, the structure with the spine layer and imitating the human skin is utilized, and through the improvement on the sensor array, the sensitivity of the sensor is further improved; meanwhile, due to the existence of the convex hemisphere structure, the sensor can sense the shape of the surface of an object, the sensitivity of the sensor is further improved, stress redistribution when the sensor is stressed is achieved by improving the structure of the sensor, and the performance of the sensor is improved.

Description

Technical field [0001] The invention belongs to the related technical field of flexible sensor arrays, and more specifically, relates to a flexible pressure sensor with a convex hemispherical structure and a preparation method thereof. Background technique [0002] As a new type of sensor, flexible sensor has great application potential and research value. Traditional rigid sensor has some problems in specific practical applications due to its poor conformability. Flexible pressure sensors have natural conformability, and their main body is generally composed of stretchable soft materials. When the flexible pressure sensor is integrated with the soft robot, it can help the soft robot to achieve effective interaction with the environment. On the other hand, the materials used in flexible sensors are generally harmless to the human body and have good biocompatibility, so they can be used as part of medical equipment. [0003] Although flexible pressure sensors have been developed r...

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Problems solved by technology

[0003] Although flexible pressure sensors have developed rapidly in recent years, most of the development has remained in the innovation of sensor materials and the microstructure of the intermediate active layer, while innovations based on the original structure of the sensor are still relatively small.

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