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Three-dimensional memory structure and preparation method thereof

A memory, three-dimensional technology, applied in the direction of electric solid devices, semiconductor devices, electrical components, etc., can solve the problems of gate layer breakdown, gate layer short circuit, etc.

Active Publication Date: 2020-10-13
YANGTZE MEMORY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a three-dimensional memory structure and its preparation method, which is used to solve the problem that the gate layer is easily hit when the contact hole is formed by etching in the existing 3D NAND preparation process. When forming a connection column in the contact hole, it will cause a technical problem of shorting between different gate layers

Method used

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  • Three-dimensional memory structure and preparation method thereof

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Embodiment 1

[0154] figure 1 A flow chart of preparing a three-dimensional memory structure according to an embodiment of the present invention is shown. see figure 1 , the preparation method of the three-dimensional memory structure includes:

[0155] Step S101, providing a semiconductor substrate;

[0156] Step S102, sequentially forming an epitaxial sacrificial layer and a stacked structure on the semiconductor substrate, the stacked structure includes alternately stacked interlayer dielectric layers and sacrificial layers, and the stacked structure includes core regions and a stepped area, the stepped area includes a first connection area, a second connection area and a third connection area arranged in sequence along the second direction;

[0157] Step S103, forming a stepped groove extending along the first direction in the second connection region of the stepped region, the stepped groove includes a plurality of steps, and the top surfaces of the steps respectively expose the sac...

Embodiment 2

[0197] see figure 2 as well as Figure 31-33 The present invention also provides a three-dimensional memory structure prepared by the preparation method in Embodiment 1, the three-dimensional memory structure at least includes a semiconductor substrate 10, an epitaxial layer 28, a stacked gate structure 30, several steps, and an etching buffer layer 18 and some connecting columns 32 ( figure 2 CT in ). The three-dimensional memory structure of this embodiment can reduce the process difficulty of etching the contact hole 20 in the stepped area, eliminate the word line bridge (Word Line Bridge) of different layers caused when the contact hole 20 is etched during the etching process (Punch), and improve the three-dimensional memory. performance of the piece.

[0198] see figure 2 as well as Figure 31-33 , in this embodiment, the semiconductor substrate 10 includes a substrate body 101, and a doped well 102 is formed in the substrate body 101 by a doping process. The sub...

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Abstract

The invention provides a three-dimensional memory structure and a preparation method thereof. The preparation method of a three-dimensional memory structure comprises: dividing the step region into afirst connecting region along a second direction, a second connection area and a third connection area, forming an etching buffer layer on the surface of a sacrificial layer of a stacked structure, which is exposed from the top surface of a step formed in a second connection region; forming a contact hole in the step region on which the etching buffer layer is formed, and when the sacrificial layer of the stacked structure is replaced by the gate conductive material, reserving the sacrificial layer in the middle of the second connection region, and ensuring the gate conductive material to be electrically connected with the etching buffer layer in the edge region of the second connection region, so that the connection column in the contact hole can be electrically connected with the gate layer through the etching buffer layer. By utilizing the method, the process difficulty of etching the contact hole in the step region can be reduced, and the risk of bridging word lines of different layers during etching of the contact hole is eliminated.

Description

technical field [0001] The invention belongs to the field of semiconductor design and manufacture, and in particular relates to a three-dimensional memory structure and a preparation method thereof. Background technique [0002] In general, a three-dimensional memory includes a gate stack structure formed by alternately stacking gate layers and interlayer dielectric layers, and a contact column (Contact, CT for short) is electrically connected to the gate in a step region of the gate stack structure. However, in the actual manufacturing process of the three-dimensional memory, in order to achieve a good electrical connection between the connecting column and the gate layer in the stack structure, it is first necessary to etch a contact hole in the dielectric layer covering the gate stack structure until the contact hole Exposing the surface of the gate layer in the step region, and then filling the contact hole with a metal material for forming a connecting column. [0003]...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/11565H01L27/1157H01L27/11582H10B43/10H10B43/27H10B43/35
CPCH10B43/35H10B43/10H10B43/27
Inventor 张坤王迪周文犀夏志良
Owner YANGTZE MEMORY TECH CO LTD
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