Device for testing thermal expansion coefficient of micro sample by using nano-mechanical tester
A technology of thermal expansion coefficient and tester, which is applied in the direction of material thermal expansion coefficient, etc., can solve the problems of not having the function of thermal expansion coefficient test, unable to realize free expansion, and unable to realize thermal expansion coefficient measurement, etc.
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[0017] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0018] The device of the present invention is used in conjunction with Histrotron (now Bruker) TI 950 nanomechanical tester and xSol800 high temperature platform.
[0019] see figure 2 , the present invention is a device for testing the thermal expansion coefficient of a nanomechanical tester, including: a silicon wafer 6, a supporting object 4, high-temperature glue and a specially designed sample.
[0020] Sample 3 was fixed on silicon wafer 6 with high temperature glue.
[0021] Select a support object 4 with a suitable size, the upper and lower surfaces are as flat as possible, and its height is greater than the height of the sample 3 after expansion.
[0022] Place the supporting object 4 on the silicon wafer 6 (in order to make the whole system more stable, place it symmetrically with the sample as the center as far as possible), and keep a certain d...
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