An experimental device for a tubular peCVD preheating system

Abstract

The invention discloses an experimental device for a tubular PECVD preheating system, which includes a preheating box, a preheating boat pushing mechanism, a boat body transfer mechanism and a transfer support frame. The boat mechanism includes a boat pusher guide rail and a boat pusher rod group. The boat pusher guide rail is fixed on one side of the clean table, and a boat pusher slider is arranged on the boat pusher rail. Facing the preheating box, there is a preheating box door that can close the entrance of the preheating box after the pushing boat lever set is inserted into the preheating box, the transfer support frame is fixed on the clean table, and the boat body transfer mechanism is located on the On the transfer support frame, the boat body transfer mechanism includes a boat body gripper, a load-bearing base and a lifting assembly. The transfer support frame is provided with a transfer guide rail, and the lifting assembly is arranged on the load-bearing base. The mobile one is set on the transfer guide rail. The invention has the advantage of being able to quickly verify the feasibility of the graphite boat preheating scheme.

Description

technical field [0001] The invention relates to tubular PECVD equipment, in particular to an experimental device of a tubular PECVD preheating system. Background technique [0002] In order to improve the productivity of tubular PECVD, shortening the process is an important way. In the process time, the time for heating and heating accounts for a large proportion. Therefore, everyone is considering saving the heating and heating time. The current method to shorten the heating and heating time is to increase the power of the furnace body, and the other is to preheat the graphite boat before it is sent into the reaction chamber. Due to the space of the equipment Due to the limitation of energy consumption and cost, the preheating method was rarely used in the previous equipment. However, with the increasing number of single-tube slides in the existing equipment, the method of increasing the number of single-tube slides to increase production capacity has reached a certain leve...

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Problems solved by technology

Therefore, everyone is considering saving the heating and heating time. At present, the method of shortening the heating and heating time is to increase the power of the furnace body, and the other is to preheat the graphite boat before it is sent into the reaction chamber. Due to the space of the equipment Due to the limitation of energy consumption and cost, the previous equipment seldom used the preheating method. However, as the single-tube loading capacity of the existing equipment is increasing, the method of increasing the single-tube loading capacity to increase production capacity has reached a certain level. Bottleneck, so the method of preheating to shorten the process time has been re-emphasized

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