SRAF image generation method and system and electronic device thereof
An image generation and layout technology, which is applied in 2D image generation, image data processing, electrical digital data processing, etc., can solve the problem that SRAF images cannot maintain layout symmetry, etc., to ensure accuracy and symmetry, and maintain symmetry. , Flexibility for a wide range of effects
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[0043] In order to make the object, technical solution and advantages of the present invention clearer, the invention will be further described in detail below in conjunction with the accompanying drawings and implementation examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0044] The invention provides a method for generating SRAF images, which is suitable for solving the problem of generating SRAF images with symmetrical layouts in the photolithography field of semiconductor manufacturing.
[0045] see figure 1 , a SRAF image generation method S10 of the present invention is described with the provided layout to be processed, and specifically includes the following steps:
[0046] Step S1: Analyzing the symmetry of each edge in the layout to be processed, selecting edges with symmetry and grouping the edges with the same symmetry; wherein, the edges in the layo...
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