Large-signal equivalent circuit model of composite strain Si/SiGe heterojunction bipolar transistor

An equivalent circuit model, heterojunction bipolar technology, applied in the direction of circuit, CAD circuit design, electrical components, etc., can solve the problem that it cannot accurately support the simulation design of integrated circuits in the terahertz frequency band

Active Publication Date: 2020-08-04
YANSHAN UNIV
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Problems solved by technology

The design and implementation of silicon-based terahertz integrated circuits is carried out close to the cut-off frequency of transistors. Generally, the cut-off frequency of transistors is 300GHz-1THz. However, the results of existing models are still concentrated around dozens of GHz, which cannot accurately support the simulation of integrated circuits in the terahertz frequency band. design

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  • Large-signal equivalent circuit model of composite strain Si/SiGe heterojunction bipolar transistor
  • Large-signal equivalent circuit model of composite strain Si/SiGe heterojunction bipolar transistor
  • Large-signal equivalent circuit model of composite strain Si/SiGe heterojunction bipolar transistor

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Embodiment Construction

[0027] Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:

[0028] Such as figure 1 As shown, it is a cross-sectional schematic diagram of a composite strained Si / SiGe heterojunction bipolar transistor. It consists of extrinsic base region 003, side wall oxide layer 004, P-type SiGe base region 005, Si cap layer 006, and polycrystalline Si emitter region 007. The upper ends of the N-type collector region 001 respectively form an extrinsic inner base region 002 and an embedded SiGe extrinsic outer base region 003, and through the embedded SiGe extrinsic outer base region 003, 002 and the N-type collector region 001 introduce uniaxial stress, and the middle part of the upper surface of the N-type collector region 001 forms a P-type SiGe base region 005, a Si cap layer 006, and a polycrystalline Si emitter region 007, thereby forming an intrinsic NPN For heterojunction bipolar transistors, the sidewall ox...

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Abstract

The invention discloses a large-signal equivalent circuit model of a composite strain Si / SiGe heterojunction bipolar transistor, and belongs to the technical field of semiconductor integrated circuits. The circuit model comprises an intrinsic NPN transistor unit, a parasitic substrate PNP transistor unit, a substrate matching network unit, a BE parasitic equivalent circuit unit, an emitter regionequivalent resistor, a base region parasitic equivalent resistor and a collector region equivalent resistor. According to the method, the physical nature of the heterojunction bipolar transistor device can be accurately reflected, the device characteristics are accurately simulated, parameters are few, the extraction process is simple, meanwhile, the established equivalent circuit model can be embedded into simulation software, and the method is suitable for simulating the simulation design of a high-frequency integrated circuit.

Description

technical field [0001] The invention relates to a compound strain Si / SiGe heterojunction bipolar transistor large-signal equivalent circuit model, which belongs to the technical field of semiconductor integrated circuits. Background technique [0002] Terahertz integrated circuits are the core of various solid-state terahertz system applications, and are a typical cross-research frontier field, which specifically involves two aspects of terahertz and integrated circuits. Among them, integrated circuit chips are the heart of the entire electronics industry, and in terms of millimeter-wave terahertz, the operating frequency of terahertz integrated circuits is thousands of times that of existing common integrated circuit chips. Design, processing, and testing are extremely challenging. As the core of terahertz integrated circuits, terahertz devices have become the key to the future development of information technology and semiconductor industry. [0003] Regarding terahertz ...

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Application Information

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IPC IPC(8): H01L29/737G06F30/39
CPCH01L29/7378
Inventor 周春宇王冠宇闫伟涛常晓伟耿欣蒋巍
Owner YANSHAN UNIV
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