Open Circuit Structure and De-embedding Method of Spiral Inductor

Abstract

The invention relating to the radio frequency device structure relates to a de-embedding open-circuit structure of a spiral inductor. The de-embedding open-circuit structure comprises a spiral inductor, a first ground ring, and a second ground ring. The spiral inductor includes an inductor spiral winding portion, a first inductor leading terminal, a second inductor leading terminal, a pin connected with the first inductor leading terminal and a pin connected with the second inductor leading terminal; and the inductor spiral winding portion is broken in the middle. The first ground ring encircles the spiral inductor; and the second ground ring encircles the first ground ring. Therefore, the accurate spiral inductance characteristics are obtained to improve the accuracy of circuit simulation.

Description

technical field [0001] The invention relates to a radio frequency device structure, in particular to an open-circuit structure for de-embedding a spiral inductor and a de-embedding method thereof. Background technique [0002] In RF device structures, accurate spiral inductor characteristics are required to improve the accuracy of circuit simulations. [0003] However, at present, the inductance characteristics are often obtained by de-embedding an open-circuit structure of a spiral inductor. However, in the existing open-circuit structure for de-embedding the spiral inductor, the parasitic capacitance of the spiral part to the ground ring is not deducted, resulting in incomplete de-embedding. The accurate inductance characteristics are not obtained, so the self-resonant frequency is low, and it often occurs that when the electromagnetic field simulation software is used to simulate the inductor, the self-resonant frequency has a large deviation. Especially when only pure i...

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Problems solved by technology

[0003] However, at present, the inductance characteristics are usually obtained by de-embedding an open-circuit structure of a spiral inductor. However, in the existing open-circuit structure for de-embedding the spiral inductor, the parasitic capacitance of the spiral part to the ground ring is not deducted, resulting in incomplete de-embedding. The accurate inductance characteristics are not obtained, so the self-resonant frequency is low, and it often occurs that when the electromagnetic field simulation software is used to simulate the inductance, the self-resonant frequency deviation is large

Especially when only pure inductance is simulated in the electromagnetic field simulation software, that is, there is no grounding ring

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