Cleaning and regenerating method of titanium crucible

Abstract

The invention discloses a cleaning and regenerating method of a titanium crucible, and relates to the technical field of OLED panel production. The method comprises the following steps of receiving inspection, wherein integrity inspection is carried out on a titanium crucible body, and the residual amount of a film layer is determined; soaking treatment with chemical liquid; pure water flushing and cleaning, wherein the titanium crucible body soaked with the liquid is flushed with pure water, and floating ash and impurities on the surface of the crucible are removed; pre-drying treatment, wherein an air gun is used for blowing the surface of the titanium crucible body flushed with the pure water, surface moisture is removed, and the titanium crucible body is placed in a drying box to be dried; high-temperature baking treatment, wherein the titanium crucible body subjected to pre-drying treatment is subjected to high-temperature baking treatment; pure water soaking operation, wherein the titanium crucible body subjected to high-temperature baking treatment is placed in pure water to be soaked; and drying and packaging, wherein the titanium crucible body soaked with the pure water isdried and packaged for use. The method has the advantages that the crucible residual film is effectively cleaned, and meanwhile the crucible loss is reduced.

Description

technical field [0001] The invention belongs to the technical field of OLED panel production, and in particular relates to a method for cleaning and regenerating a titanium crucible. Background technique [0002] OLED industry, as a key development display technology in China and even in the world, after just over ten years of exploration and innovation, has been comparable to the decades of development of LED, and the industrialization momentum is extremely obvious. The key process of the OLED display process is vacuum evaporation, which is mainly to heat the organic material under vacuum. Due to the different characteristics of the material, some materials will be liquefied and then gasified or directly sublimated, and then fly away from the surface of the material at a certain initial speed. , move to the substrate surface, cool down and deposit to form a thin film. The heater used to store organic evaporation materials is a titanium line source crucible. With the extens...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to: in view of the influence of product structure on titanium crucible parts in the prior art, organic film residues often exist in the gaps, which have a significant impact on product quality. At present, the organic film is removed by chemical liquid washing. And the problem that the chemical solution and the organic residual film in the through hole area cannot completely react, and the organic residual film in the narrow gap cannot be completely removed after repeated liquid washing and rework. A cleaning and regeneration method for a titanium crucible is provided.

Images