Photonic crystal high-power laser and preparation method thereof
A technology of high-power lasers and photonic crystals, applied in semiconductor lasers, lasers, phonon exciters, etc., can solve problems such as poor beam quality and limit the application of semiconductor lasers, and achieve wide wavelength tuning range, high power, and improved tuning range Effect
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Embodiment 1
[0034] Further, the cross section of the air column 9 is circular, oval or polygonal.
[0035]A method for preparing a photonic crystal high-power laser, comprising the steps of:
[0036] a) Put the GaAs substrate into the growth chamber of the MOCVD equipment, and pass through , baked for 30 minutes in an environment with a temperature of 700±20°C, and after the , remove water and oxygen on the surface of the substrate to complete the heat treatment of the substrate surface;
[0037] b) Lower the temperature to 650±20°C and pass through and TMGa, growing a GaAs low-temperature buffer layer 1 with a thickness of 0.5-1 μm on the GaAs substrate;
[0038] c) The temperature is maintained at 650±20°C, and the , TMGa and TMAl, growing an AlGaAs lower confinement layer 2 on the GaAs low-temperature buffer layer 1;
[0039] d) The temperature is kept at 650±20°C, and the lower Bragg reflective layer 3 made of n-type AlxGayAs / AlxGayAs is grown on the AlGaAs lower confinemen...
Embodiment 2
[0048] Preferably, when growing the GaAs low-temperature buffer layer 1 in step b), the doping concentration in the growth chamber of the MOCVD equipment is 1E17-5E18 atoms / , when growing the AlGaAs lower confinement layer 2 in step c), the doping concentration in the growth chamber of the MOCVD equipment is 1E17-5E18 atoms / .
Embodiment 3
[0050] Preferably, the thickness of the lower Bragg reflective layer 3 in step d) is 0.5-2 μm, and the doping concentration in the growth chamber of the MOCVD equipment when growing the lower Bragg reflective layer 3 is 1E16-5E17 atoms / , when growing the lower Bragg reflection layer 3, cyclic growth is adopted, and the number of cycles is 20-30 times.
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