A three-phase linear electrostatic motor and its control method

Abstract

The invention discloses a three-phase linear electrostatic motor and a control method thereof, which include a stator plate, a movable sub-plate, a drive circuit and a power supply, an insulating liquid is filled between the stator plate and the movable sub-plate, the stator plate, the movable sub-plate Several copper electrodes are etched on the surface of the daughter board, the number of electrodes on the stator board is greater than the number of electrodes on the mover board, the electrodes on the stator board are applied with a three-phase square wave driving voltage, and the electrodes on the mover board are Apply a constant drive voltage. Compared with the magnetoelectric motor, the linear electrostatic motor has no excitation coil, which can greatly reduce the volume, and the loss to be overcome is correspondingly reduced; as a power module of a micro-machine, the electrostatic motor can exert its own advantages, and can be used in various subtle and complex applications. It is widely used in the environment; the driving method based on square wave control makes the electrostatic motor have good performance at low speed, and improves the operating speed and commutation speed of the motor.

Description

technical field [0001] The invention relates to a three-phase linear electrostatic motor, in particular to a double-excitation three-phase linear electrostatic motor controlled by square wave voltage. Background technique [0002] An electrostatic motor is an energy conversion device that uses static electricity as an energy source. With the development of modern production, there is an increasingly strong demand for non-magnetic miniaturized motors, especially in the aerospace field. Electrostatic forces are more attractive and promising than magnetic forces for micromechanical systems. Despite years of research history, electrostatic motors are rarely used in practice due to the high voltage and high mechanical precision required. Compared with the magnetoelectric motor, the electrostatic motor has no excitation coil, and the loss to be overcome is correspondingly reduced. At the same time, the electrostatic force is inversely proportional to the square of the size, and...

AI Technical Summary

Problems solved by technology

Although the thrust of the motor can reach tens of newtons and its moving speed exceeds 1m / s, the structure of the motor requires a large number of power supply phases, and the AC signal is used for power supply, which increases the complexity and size of the driving power supply and reduces the size of the motor. output force

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