Water-based polishing solution
A polishing liquid and water-based technology, applied in the field of polishing, can solve the problems of weak anti-sedimentation effect and achieve good anti-sedimentation effect
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Embodiment 1
[0033] S1, the magnetic SiO 2 Nanoparticles and benzyltrichlorosilane were uniformly dispersed in toluene at a mass ratio of 1:2, reacted at 75°C for 2 days, separated the solid, washed, and dried to obtain chlorobenzyl-grafted SiO 2 Nanoparticles;
[0034] S2, N-(2-aminoethyl)-3-aminopropylmethyldiethoxysilane is added to water, and hydrolyzed at pH=10~11 to obtain a hydrolyzate solution, wherein, N-(2- The mass ratio of aminoethyl)-3-aminopropylmethyldiethoxysilane to water is 1:10; the magnetic SiO 2 Nanoparticles are uniformly dispersed in water at 1g: 100mL to obtain a dispersion; after mixing the hydrolyzate solution and the dispersion, heat and reflux at 90°C for 12h, separate and dry to obtain amino-modified SiO 2 nanoparticles, among them, magnetic SiO 2 The mass ratio of nanoparticles to N-(2-aminoethyl)-3-aminopropylmethyldiethoxysilane is 2.5:1;
[0035] S3, SiO grafted with chlorobenzyl 2 Nanoparticles and amino-modified SiO 2 Nanoparticles are uniformly dis...
Embodiment 2
[0042] S1, the magnetic SiO 2 Nanoparticles and benzyltrichlorosilane were uniformly dispersed in toluene at a mass ratio of 1:2, reacted at 75°C for 2 days, separated the solid, washed, and dried to obtain chlorobenzyl-grafted SiO 2 Nanoparticles;
[0043] S2, N-(2-aminoethyl)-3-aminopropylmethyldiethoxysilane is added to water, and hydrolyzed at pH=10~11 to obtain a hydrolyzate solution, wherein, N-(2- The mass ratio of aminoethyl)-3-aminopropylmethyldiethoxysilane to water is 1:10; the magnetic SiO 2 Nanoparticles are uniformly dispersed in water at 1g: 100mL to obtain a dispersion; after mixing the hydrolyzate solution and the dispersion, heat and reflux at 90°C for 12h, separate and dry to obtain amino-modified SiO 2 nanoparticles, among them, magnetic SiO 2 The mass ratio of nanoparticles to N-(2-aminoethyl)-3-aminopropylmethyldiethoxysilane is 2.5:1;
[0044] S3, SiO grafted with chlorobenzyl 2 Nanoparticles and amino-modified SiO 2 The nanoparticles are uniformly...
Embodiment 3
[0049] S1, the magnetic SiO 2 Nanoparticles and benzyltrichlorosilane were uniformly dispersed in toluene at a mass ratio of 1:2, reacted at 75°C for 2 days, separated the solid, washed, and dried to obtain chlorobenzyl-grafted SiO 2 Nanoparticles;
[0050] S2, N-(2-aminoethyl)-3-aminopropylmethyldiethoxysilane is added to water, and hydrolyzed at pH=10~11 to obtain a hydrolyzate solution, wherein, N-(2- The mass ratio of aminoethyl)-3-aminopropylmethyldiethoxysilane to water is 1:10; the magnetic SiO 2 Nanoparticles are uniformly dispersed in water at 1g: 100mL to obtain a dispersion; after mixing the hydrolyzate solution and the dispersion, heat and reflux at 90°C for 12h, separate and dry to obtain amino-modified SiO 2 nanoparticles, among them, magnetic SiO 2 The mass ratio of nanoparticles to N-(2-aminoethyl)-3-aminopropylmethyldiethoxysilane is 2.5:1;
[0051] S3, SiO grafted with chlorobenzyl 2 Nanoparticles and amino-modified SiO 2 Nanoparticles are uniformly dis...
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