A precise control device for ambient atmosphere in narrow experimental cavity of scanning probe microscope

Abstract

The invention discloses a device for accurately controlling the ambient atmosphere of a narrow experimental chamber of a scanning probe microscope, which comprises a first air inlet, a second air inlet, a main gas pipeline, an auxiliary gas pipeline, a humidifying gas pipeline, a gas circulation pipeline, an external Mixing chamber, experimental chamber and sensory feedback system. The first air inlet is connected with the external mixing chamber through the main gas pipeline. The second air inlet is connected with the external mixing chamber through the auxiliary gas pipeline. After the auxiliary gas pipeline passes through the auxiliary gas electromagnetic reversing valve, a humidifying gas pipeline is separately separated, and the other end of the humidifying gas pipeline is connected with the external mixing chamber. One end of the gas circulation pipeline is connected to the external mixing chamber, and the other end is connected to the experimental chamber. The sensory feedback system is connected to the gas concentration sensor inside the external mixing chamber, and controls the main gas electromagnetic reversing valve and the auxiliary gas electromagnetic reversing valve. The invention can realize the accurate preparation of nitrogen, oxygen, hydrogen, argon, water vapor, alcohol vapor and other single or mixed ambient atmospheres.

Description

technical field [0001] The invention relates to the field of scanning probe technology or equipment, in particular to a device for precisely controlling the environment atmosphere in a narrow experimental chamber of a scanning probe microscope. Background technique [0002] The emergence of nanotechnology is undoubtedly a major breakthrough in modern science and technology, and nanotribology is an important part of it. Nano tribology is the study of the contact between substances at the atomic and molecular scale, as well as the microscopic friction, wear and lubrication behavior and mechanism of the surface during the sliding process. Nano tribology is a major expansion and in-depth study of traditional macro tribology. Scanning probe microscopy has become an indispensable device in the field of microscopic research due to its nanometer or even subnanometer scanning resolution and excellent characterization capabilities for microscopic tribological behavior. In the study ...

AI Technical Summary

Problems solved by technology

[0010] Because the experimental cavity of some scanning probe microscopes is very narrow, the following problems are caused: 1) The gas mixing operation inside the experimental cavity is difficult and takes a long time, which may cause changes in the surface properties of the material; 2) There is not enough space inside to install a large volume 3) The commercial gas generator is expensive and has a single function, and can only prepare the humidity environment atmosphere; 4) The environment atmosphere control device developed by ourselves needs to use the experiment chamber for gas mixing. , and it needs to be ventilated all the time to ensure the ambient atmosphere inside the experimental chamber, which cannot be applied to a small experimental chamber

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