Ultrasonic vibration assisted self-rotating grinding machine and main shaft device thereof

Abstract

The invention discloses an ultrasonic vibration assisted self-rotating grinding machine body and a main shaft device thereof. The main shaft device comprises a rotating main shaft part and an ultrasonic vibration part, and the ultrasonic vibration part is fixedly arranged on the rotating main shaft part; the ultrasonic vibration part comprises an ultrasonic generator, a transducer, an ultrasonic amplitude horn, a grinding wheel and an induction coil; and the ultrasonic generator is connected with the induction coil, the induction coil is arranged on the transducer, the transducer is connectedwith the ultrasonic amplitude horn, the grinding wheel is fixedly arranged at the tail end of the ultrasonic amplitude horn, the ultrasonic generator generates an ultrasonic signal, the ultrasonic signal is transmitted to the transducer through the induction coil to generate ultrasonic vibration, and then axial vibration is converted into radial vibration of the grinding wheel through the ultrasonic amplitude horn. The ultrasonic vibration assisted self-rotating grinding machine body and the main shaft device thereof have the following advantages that the grinding efficiency can be improved, the quality of a machining surface can be improved, the grinding wheel can also be prevented from blocking, and great significance is achieved for promoting wide application of ultrasonic assisted grinding technology.

Description

technical field [0001] The invention relates to the field of grinding processing, in particular to an ultrasonic vibration-assisted self-rotating grinding machine tool and a spindle device thereof. Background technique [0002] Spinning grinding is a common method for high-efficiency and precise machining of hard and brittle materials. It is widely used in the processing of hard and brittle materials such as ceramics, glass, and semiconductor substrates. However, in the processing of these hard and brittle material parts, it is often necessary to obtain precise surface quality, that is, lower surface roughness and smaller surface and subsurface damage. In order to improve the quality of the grinding surface and reduce damage, it is usually necessary to use a fine-grained diamond grinding wheel, but when grinding with a fine-grained diamond grinding wheel, the efficiency is low, and the grinding wheel is easy to wear and block. Therefore, achieving high-efficiency precision ...

AI Technical Summary

Problems solved by technology

Correspondingly, the wide application of ultrasonic vibration assisted spin grinding technology is also limited by the development of ultrasonic assisted spin grinding machine tools.

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