Piezoelectric integrated flexible tactile sensor and preparation method thereof
A tactile sensor, piezoelectric technology, applied in the field of sensors, can solve the problems that the sensitivity and range of the tactile sensor can not be adaptive, low mobility, low sensitivity, etc., to enhance the flexibility of perception and use, high carrier Effects of mobility and high electrical coefficient
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[0029] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings of the present invention, and the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, other embodiments obtained by persons of ordinary skill in the art without making creative efforts all belong to the protection scope of the present invention.
[0030] Such as figure 1 As shown, the embodiment of the present invention provides a piezoelectric integrated flexible tactile sensor, which includes a double-gate structure MO TFT and a nano-piezoelectric sensitive unit located on the top gate electrode layer of the double-gate structure MO TFT . The oxide film of the double gate structure includes a flexible substrate 1, a bottom gate electrode 2, a bottom gate dielectric layer 3, a metal oxide semiconductor film layer 4...
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