Three-dimensional photonic crystal and application thereof
A photonic crystal, three-dimensional technology, applied in optics, optical components, instruments, etc., can solve the problem of photonic band gap limitation, high incidence angle dependence, unable to form an effective band gap, etc., to achieve the best application prospects, ensure strength and stability sexual effect
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[0058] This example is prepared as figure 1 The 3D photonic crystal shown.
[0059] Through electron beam exposure combined with reactive ion beam etching technology, an array of holes arranged periodically in a triangular hexagonal structure is etched on the SOI wafer to obtain a base layer. Wherein, the distance between two adjacent holes is recorded as a, and the wavelength λ of the input optical signal is 1550nm, so it can be obtained that a=738nm, the aperture size is 0.88a, and the thickness of the SOI wafer is 0.82a.
[0060] When the three base layers are stacked together by wafer bonding technology, and when the hole array is etched on each silicon monolayer, the position of the hole array is relative to the upper layer, and there is one on the xy plane. image 3 The displacement along the vector P(0.5a, 0.29a) is shown, thus obtaining a periodic structure.
[0061] combine Figure 4 , in the process of preparing the base layer, after selectively removing 5 rows of...
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Abstract
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