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Vanadium dioxide intelligent thermal control device with longhorn beetle-imitating multistage structure and preparation method thereof

A technology of vanadium dioxide intelligence and longhorn, which is applied in the control of the living conditions of aerospace vehicles, ion implantation plating, coating, etc., can solve the problems of small emissivity change and high solar absorption ratio

Active Publication Date: 2020-04-14
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention will solve the existing VO-based 2 The emissivity of the smart thermal control device has small change and the solar absorption ratio is high, and a vanadium dioxide smart thermal control device with a multi-level structure imitating the beetle and its preparation method are provided

Method used

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  • Vanadium dioxide intelligent thermal control device with longhorn beetle-imitating multistage structure and preparation method thereof

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specific Embodiment approach 1

[0027] Specific implementation mode one: combine figure 1 Describe this embodiment in detail. In this embodiment, a vanadium dioxide intelligent thermal control device with a multi-level structure imitating a beetle is sequentially composed of a semiconductor base layer, an infrared highly reflective metal layer, HfO 2 Dielectric layer, VO 2 layer and protective layer composition;

[0028] The HfO 2 The dielectric layer consists of multiple HfO 2 Composed of micro-nano structural units, and HfO 2 The shape of the micro-nano structural unit is a cube with a square base, and multiple HfO 2 The micro-nano structural units are uniformly arranged on the upper surface of the infrared highly reflective metal layer; the HfO 2 The bottom square of the micro-nano structural unit has a side length of 1 μm to 10 μm and a height of 400nm to 2000nm; adjacent HfO 2 The distance between micro-nano structural units is 0.5 μm to 5 μm;

[0029] The VO 2 layer consists of multiple W-doped...

specific Embodiment approach 2

[0033] Embodiment 2: This embodiment is different from Embodiment 1 in that: the semiconductor base layer is quartz, glass or silicon; the infrared highly reflective metal layer is Ag, Ni, Mg, Zn or Al; The above protective layer is Al 2 o 3 , SiO 2 、TiO 2 or ZrO 2 . Others are the same as in the first embodiment.

specific Embodiment approach 3

[0034] Specific embodiment three: the difference between this embodiment and specific embodiment one or two is that: the thickness of the infrared highly reflective metal layer is 50nm-250nm; the HfO 2 The thickness of the dielectric layer is 400nm-2000nm; the VO 2 The thickness of the layer is 50nm-500nm; the thickness of the protective layer is 50nm-100nm. Others are the same as those in the first or second embodiment.

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Abstract

The invention discloses a vanadium dioxide (VO2) intelligent thermal control device with a longhorn beetle-imitating multistage structure and a preparation method thereof, and belongs to the technicalfield of intelligent thermal control coating layers. The problems that an existing intelligent thermal control device based on VO2 is small in emissivity change and high in solar absorption ratio aresolved. The VO2 intelligent thermal control device with the longhorn beetle-imitating multistage structure is composed of a semiconductor substrate layer, an infrared high-reflection metal layer, anHfO2 dielectric layer, a VO2 layer and a protective layer in sequence from bottom to top. The preparation method comprises the steps: 1, preparing the infrared high-reflection metal layer; 2, preparing a dielectric film; 3, preparing a VO2 film; 4, processing a microstructure; and 5, depositing a protective layer. The invention discloses the vanadium dioxide intelligent thermal control device withthe longhorn beetle-imitating multistage structure and the preparation thereof.

Description

technical field [0001] The invention belongs to the technical field of intelligent thermal control coating. Background technique [0002] Spacecraft will face a complex alternating temperature field when operating in space, which mainly exchanges energy with the outside world through radiative heat exchange; as an important part of the spacecraft’s surface thermal control system, the spacecraft’s thermal control device plays an important role in maintaining the internal temperature of the spacecraft. Stability and ensuring the normal operation of the spacecraft play a key role. The emissivity of traditional thermal control devices is fixed and cannot be changed with changes in external temperature; however, new intelligent thermal control devices can automatically adjust their emissivity with changes in external environment temperature, which is one of the hot topics in the current research on spacecraft thermal control technology. The main principle is: when the external e...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/18C23C14/16C23C14/08C23C14/10C23C14/58B64G1/50
CPCB64G1/50C23C14/081C23C14/083C23C14/10C23C14/165C23C14/185C23C14/3485C23C14/35C23C14/5826C23C14/5846
Inventor 赵九蓬谷金鑫豆书亮李垚任飞飞魏航李龙
Owner HARBIN INST OF TECH
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