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A ceramic point source for evaporation equipment

A ceramic and point source technology, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve problems affecting the temperature control of the crucible, and achieve stable heat conduction loss, precise and uniform temperature control, and high heating speed fast effect

Active Publication Date: 2021-01-08
山东国晶新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this scheme, the heating zone is not designed in detail. As the core component of the evaporation equipment, the design of the heating zone is particularly critical. In this scheme, the internal crucible is easy to conduct heat through the insulating sheet and the support frame, which affects the temperature control of the crucible.

Method used

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  • A ceramic point source for evaporation equipment
  • A ceramic point source for evaporation equipment
  • A ceramic point source for evaporation equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0051] A ceramic point source for uniform heating on evaporation equipment, including a connecting flange 3, an electrode-thermocouple connection base 2, a cooling water jacket 12, a heat preservation component, a heating component, and an evaporation chamber; figure 1 shown.

[0052] The connection flange 3 is connected with the electrode-thermocouple connection base 2, and the connection flange is used to connect and fix the ceramic point source to the external equipment. The electrode-thermocouple connection base is provided with an external electrode 1 and a vacuum thermocouple joint 15. The flange 3 is provided with a cooling water pipe 4, one end of the cooling water pipe 4 is connected to the connecting bottom ring 9, and the upper side of the connecting bottom ring 9 is provided with a cooling water jacket 12, and the cooling liquid in the cooling water pipe enters the cooling water jacket through the connecting bottom ring 9 Circulating cooling is carried out to achie...

Embodiment 2

[0056] A ceramic point source used for uniform heating on evaporation equipment, its structure is as described in Embodiment 1, the difference is that the heat preservation component includes a metal heat preservation cylinder 23, and the metal heat preservation cylinder includes two nested shells 23- 1 and the bottom surface, a cylindrical insulation board is arranged between the two shells.

[0057] The bottom surface of the metal insulation cylinder is connected with a base plate 10, and the large supporting plate is provided with support columns, which are used to provide support for the base plate. The two shells and the bottom surface of the metal insulation cylinder are welded together, the bottom surface is thinner, and the bottom plate is added to provide stronger support.

Embodiment 3

[0059] A ceramic point source for uniform heating on evaporation equipment, its structure is as described in Embodiment 2, the difference is that the heater is a pyrolytic boron nitride-pyrolytic graphite heater, and the heater includes a substrate, a device The circuit layer on the substrate, the insulating layer, and the circuit connector, the circuit connector is connected to the electrode of the heater, and the heater is heated by an external power supply, and the heating component also includes a bottom connection ring 21, which is located above the bottom plate 10, such as Figure 5 Shown, the bottom attachment ring is used to support the heater.

[0060] The support column runs through the bottom plate, and the support column is threadedly connected with the bottom connecting ring. The support column fixes between the large supporting plate, the base plate and the bottom connecting ring.

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Abstract

The invention discloses a ceramic point source for evaporation equipment, and belongs to the technical field of material thermal evaporation. The device comprises a connecting flange and an electrode-thermocouple connecting base, a cooling water jacket, a heat preservation component, a heating component and an evaporation chamber; the connecting flange is used for connecting and fixing the ceramicpoint source to external equipment; an external electrode and a vacuum thermocouple joint are arranged on the electrode-thermocouple connecting base in a penetrating mode; the upper part of the connecting flange is connected to the cooling water jacket through a cooling water pipe; the heat preservation component and the heating component are arranged in the cooling water jacket; the evaporationchamber is formed in the heating component; the heating component comprises a heater and a heat source; a heater electrode is arranged below the heater; the heater electrode is connected with the external electrode; one end of a thermocouple is connected with the vacuum thermocouple joint; and the other end of the thermocouple is located in the evaporation chamber. The heating speed is high, the energy consumption is low, and the temperature uniformity is high.

Description

technical field [0001] The invention relates to a ceramic point source for uniform heating on evaporation equipment, belonging to the technical field of material thermal evaporation. Background technique [0002] The point source used in the field of evaporation is used to heat the crucible, which contains evaporation materials. At present, the point source used in the field of evaporation is mostly supported and heated at the bottom of the crucible, so that the point source near the bottom The temperature of the evaporating material will be high, and the temperature of the evaporating material near the upper end will be low, so the heating method cannot guarantee the uniformity of heating. Different crucibles contain different evaporating materials, and different evaporating materials have different evaporation temperatures. The temperature is too high and too low will cause major problems in the evaporation process, which cannot meet the fine control requirements of evapor...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/54
CPCC23C14/24C23C14/54
Inventor 刘汝强刘强王殿春吴思华刘庆毅王之腾孙蕾
Owner 山东国晶新材料有限公司
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