Semiconductor equipment alarm management system

Abstract

The present invention discloses an alarm management system for semiconductor equipment, comprising: multiple alarm clients and alarm servers, wherein the multiple alarm clients are respectively configured in multiple functional control modules of the semiconductor equipment for use in the Alarm information is generated when the semiconductor equipment is abnormal, and the alarm information is sent to the alarm server through a unified alarm interface; the alarm server is configured in the central control module of the semiconductor equipment and is used for displaying in the user interface The received alarm information. Realize the comprehensive management and scheduling of various alarm resources of semiconductor equipment, effectively utilize system resources and software development costs, and improve the security and stability of semiconductor equipment.

Description

technical field [0001] The invention relates to the technical field of semiconductors, and more specifically, to an alarm management system for semiconductor equipment. Background technique [0002] In the interactive management system, most of the alarm management methods used by the commonly used automation control systems are aimed at a specific module, and each module uses an alarm exception processing method within itself to achieve the purpose of system self-repair. [0003] In semiconductor equipment, the control system software of the same equipment often includes multiple different control modules. The multiple different control modules all use the same alarm system, but the multiple different control modules operate independently. Simultaneously, different control modules may run on one or more computers, and the shortcomings of the existing alarm exception processing methods are particularly obvious in this distributed computing, and they are not suitable for runn...

AI Technical Summary

Problems solved by technology

Simultaneously, different control modules may run on one or more computers, and the shortcomings of the existing alarm exception processing methods are particularly obvious in this distributed computing, and they are not suitable for running in multiple computers (or running in one computer) The exception handling of multiple modules of ) lacks unified management, and at the same time, it is impossible to reuse various similar exceptions. The occurrence and processing methods of exceptions distributed on different modules cannot be uniformly scheduled. The software exception handling system also needs to be changed, which causes a lot of waste of existing resources and the inability to reuse software resources, resulting in an upgrade of software development costs

At the same time, according to the module's internal automatic processing of abnormal alarms, there will be a certain probability that program errors will lead to wrong processing methods, so that abnormal processing cannot be handled correctly, resulting in potential safety hazards and operational stability of the equipment.

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