Test device for planar three-dimensional shape based on multiple-beam angle adaptive optics and processing method thereof

Abstract

The invention discloses a test device for a planar three-dimensional shape based on multiple-beam angle adaptive optics and a processing method thereof. The test device mainly comprises a bearing platform, a bracket, a XY platform, a rotating platform, a tilting platform and a multi-beam angle sensor. Laser beams generated by a semiconductor laser in the technical solution of the invention pass through a pinhole of a first filter plate, and is aligned by a collimator lens, and then projected on surface of a workpiece under action of a beam splitter. Reflected beams from surface of the workpiece completely reach a microlens array through the beam splitter. Incident light is divided into a plurality of small samples by the microlens array and then focused on a detector array, thereby producing many separated optical focuses on a CMOS camera. The positions of the optical focuses are directly related to a slope of the workpiece. An algorithm is used to process an images detected from the CMOS camera, determine the positions of the focuses, finally calculate the slope by comparing with an original position, and reconstruct a contour from the slope.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to a flatness three-dimensional shape detection device based on complex beam angle adaptive optics and a processing method thereof. Background technique [0002] In recent years, with the rapid development of science and technology, social production and life have also been greatly improved. In order to better meet more life scenes and industrial production and processing, 3D shape detection technology came into being. The technology of 3D shape measurement has been continuously and rapidly developed and perfected since its birth, and has been widely used in more and more fields. Whether it is traditional fields such as physical profiling, 3D reconstruction, industrial production inspection, terrain rendering, or high-tech fields such as biomedicine, semiconductor industry, aerospace, etc., you can see that 3D shape detection plays a pivotal role in these industries every...

AI Technical Summary

Problems solved by technology

However, this detection method has the following disadvantages. Any small fluctuations and disturbances of people in the measurement environment will have a great impact on the measurement results, which directly determines the final measurement quality. This requires a measurement system based on the principle of phase shift interference. The surrounding environmental factors are strictly controlled

That is to say, due to its extremely high sensitivity, the method based on interferometry for aspheric workpieces is not easy to carry out in complex production environments.

In addition, the applicable measurement scale range of phase-shift interferometry is relatively small, and the shape fluctuation of the measured workpiece is generally around tens of microns, and the possibility of measuring hundreds of microns is very small.

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