Purifying method of aluminum nitride powder, aluminum nitride powder prepared by method and application of aluminum nitride powder

A purification method, aluminum nitride technology, applied in the field of materials, can solve the problems of reducing the thermal conductivity of aluminum nitride ceramic products, unfavorable powder production and promotion, and achieve the effect of promoting sintering synthesis and improving thermal conductivity

Inactive Publication Date: 2020-01-17
AEROSPACE INST OF ADVANCED MATERIALS & PROCESSING TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This simple carbon removal purification process can remove excess carbon contained in the powder within a certain range, but in the air atmosphere, the aluminum nitride powder will react with oxygen to a certain extent, so that the powder after carbon removal is introduced Oxygen impurities, since the thermal conductivity of alumina is generally 30-40W / m / K, which is far lower than the theoretical thermal conductivity of aluminum nitride ceramics (319W / m / K), the presence of oxygen impurities will greatly reduce the nitrogen The thermal conductivity of aluminum nitride ceramic products, this method of purification of aluminum nitride powder is not conducive to the production and promotion of powder

Method used

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  • Purifying method of aluminum nitride powder, aluminum nitride powder prepared by method and application of aluminum nitride powder
  • Purifying method of aluminum nitride powder, aluminum nitride powder prepared by method and application of aluminum nitride powder
  • Purifying method of aluminum nitride powder, aluminum nitride powder prepared by method and application of aluminum nitride powder

Examples

Experimental program
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Effect test

Embodiment 1

[0033] Take 18g of the aluminum nitride powder raw material (3.5% by weight of carbon content) prepared by the carbothermal reduction process, put it into a boron nitride crucible, place the crucible in a tubular sintering furnace, vacuumize, and then introduce carbon dioxide gas , the flow rate is 200ml / min, and then the tube furnace is heated, the furnace temperature is raised to 700°C, and the temperature is kept constant for 3 hours to obtain high-purity aluminum nitride powder products.

[0034] It is determined that the carbon impurity content of the prepared aluminum nitride powder product is 0.028% by weight as measured by a carbon and sulfur analyzer. The oxygen impurity content was determined to be 0.63% by weight by the inert gas pulse infrared thermal conductivity method, and the results can be seen in Table 1 below. The microstructure of aluminum nitride powder raw materials is as follows: figure 1 As shown, the microstructure of the purified aluminum nitride pow...

Embodiment 2

[0036] Take 33g of the aluminum nitride powder raw material (6.3% by weight of carbon content) prepared by the carbothermal reduction process, put it into a boron nitride crucible, place the crucible in a tubular sintering furnace, vacuumize, and then introduce carbon dioxide gas , the flow rate is 100ml / min, and then the tube furnace is heated, and the furnace temperature is raised to 1000°C, and then kept at constant temperature for 4 hours to obtain high-purity aluminum nitride powder products.

[0037]It is determined that the carbon impurity content of the prepared aluminum nitride powder product is 0.035% by weight as measured by a carbon and sulfur analyzer. The oxygen impurity content was measured by the same method as in Example 1 to be 0.76% by weight.

Embodiment 3

[0039] Take 41g of the aluminum nitride powder raw material (5.8% by weight of carbon content) prepared by the carbothermal reduction process, put it into a boron nitride crucible, and place the crucible in a tubular sintering furnace, vacuumize, and then introduce carbon dioxide gas , the flow rate is 150ml / min, and then the tube furnace is heated, and the furnace temperature is raised to 950°C, and then kept at constant temperature for 3.5 hours to obtain high-purity aluminum nitride powder products.

[0040] It is determined that the carbon impurity content of the prepared aluminum nitride powder product is 0.031% by weight as measured by a carbon and sulfur analyzer. The oxygen impurity content was measured by the same method as in Example 1 to be 0.66% by weight. The results can be seen in Table 1 below.

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Abstract

The invention relates to a purifying method of aluminum nitride powder, and the method comprises the following steps: (1) putting an aluminum nitride powder raw material containing carbon impurities into a container, putting the container into a sintering furnace, and vacuumizing to discharge impurity gas in the furnace; and (2) introducing carbon dioxide gas into the sintering furnace, and then performing sintering treatment to obtain the aluminum nitride powder. The invention also relates to the aluminum nitride powder prepared by the method and application of the aluminum nitride powder inpreparation of aluminum nitride ceramics. The method breaks through the limitation of the traditional carbon discharge process; new oxygen element impurities are not introduced, carbon impurities which are not completely reacted in the nitridation reaction are removed, and the high-purity aluminum nitride powder can be obtained; the high-purity aluminum nitride powder can effectively promote sintering synthesis of aluminum nitride ceramic and finally effectively improve the performance such as the heat conductivity of an aluminum nitride ceramic product, and therefore the high-purity aluminumnitride powder has wide application prospects in the field of manufacturing of heat dissipation substrates and circuit substrates, especially large-scale integrated circuit substrates.

Description

technical field [0001] The invention relates to the technical field of materials, in particular to a method for purifying aluminum nitride powder, the aluminum nitride powder prepared by the method and applications thereof. Background technique [0002] Aluminum nitride ceramics have high theoretical thermal conductivity (319W / m / K), low dielectric constant, thermal expansion coefficient similar to silicon materials, excellent electrical insulation, high mechanical strength, non-toxicity and resistance Corrosion and other properties have received widespread attention, and have gradually become the preferred material for large-scale integrated circuit substrates and heat dissipation substrates for high-density packaging. For the sintering preparation of aluminum nitride ceramics, as the most critical raw material, the purity of aluminum nitride powder has a great influence on the subsequent molding and sintering. Using high-purity powder as raw material can effectively improve...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B21/072
CPCC01B21/0728C01P2002/80C01P2004/03
Inventor 韩耀王华栋吕毅赵英民张昊张天翔
Owner AEROSPACE INST OF ADVANCED MATERIALS & PROCESSING TECH
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