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Insulator and quartz boat

A technology of insulators and quartz boats, applied in the field of quartz boats, can solve problems such as limited effects

Pending Publication Date: 2019-12-03
山东力冠微电子装备有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

In some implementations, the insulator 4 is made of ceramic material, trying to reduce the carbon deposition by reducing the surface roughness of the ceramic insulator 4, but the effect is extremely limited, and the surface roughness of the current ceramic material can be up to Ra0.4, The cost of improving the surface accuracy is too high. Therefore, more options are to directly replace the insulator 4, which will cause a lot of later maintenance

Method used

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  • Insulator and quartz boat
  • Insulator and quartz boat
  • Insulator and quartz boat

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Experimental program
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Effect test

Embodiment Construction

[0034] The insulator 4 used on the quartz boat is generally a sleeve structure, such as figure 1 as shown, figure 1 Among them, seven electrode sheets (also known as electrode plates) are assembled in parallel through six fixed rods 2 and nuts 3. The insulator 4 set on the fixed rod 2 is used for insulation between adjacent electrode sheets, and the insulator The axial length of 4 determines the distance between adjacent electrode plates.

[0035] Generally speaking, the airflow carrying the carbon powder flows through the space between the electrode plates in an advection manner. Regarding the boundary friction effect of Newtonian internal friction, it can also be understood based on conventional life experience. For example, the closer the water flow in a river is to the center line, the faster the water flow speed. On the contrary, the closer to the shore, the slower the water flow speed. For the boundary friction effect produced by the side flow, the side flow produces i...

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Abstract

The invention discloses an insulator and a quartz boat. The insulator is used for positioning and insulation between electrode pieces on the quartz boat. The insulator comprises an insulator body which comprises a first end and a second end opposite to the first end, and two first positioning parts which are arranged on the first end and the second end respectively to separate the first end and the electrode piece on the side of the first end by a first distance and separate the second end and the electrode piece on the side of the second end by a first distance. The outer diameter of the positioning part is smaller than the outer diameter of the insulator body, and a first slit is determined by the first distance. The insulator provided by the invention can effectively reduce the influence of the problem of declined insulation performance caused by carbon deposition inversion.

Description

technical field [0001] The invention relates to an insulator, and the invention also relates to a quartz boat equipped with the insulator. Background technique [0002] With the great development of the new material industry, materials such as graphene, gallium nitride, and silicon carbide have been very mature in application, and can be applied to fields such as display, laser projection, lighting, electrical and electronics, aerospace and aerospace, but raw material preparation The high cost has become a major obstacle to its rapid promotion and application. At present, LPCVD (Low Pressure Chemical Vapor Deposition, low pressure chemical vapor deposition method) is a production process with high efficiency for producing graphene, and the product quality is high. [0003] Graphene boats are needed during the LPCVD growth process of graphene, relying on radio frequency discharge between the graphite boat electrodes to deposit carbon elements in the atmosphere onto the substr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01B17/40C23C16/26C23C16/505
CPCC23C16/26C23C16/505H01B17/40
Inventor 宋德鹏姜良斌
Owner 山东力冠微电子装备有限公司
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