Chip interconnection packaging method and interconnection packaging structure

An encapsulation method and encapsulation structure technology, applied in the directions of electrical components, electrical solid devices, circuits, etc., can solve the problems of breakage, peeling off, metal stripping of through holes, and unstable electrical conductivity of wires 30, so as to improve reliability, The effect of dispersing stress and improving the reliability of electrical connection

Inactive Publication Date: 2019-11-15
浙江荷清柔性电子技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the packaging structure obtained through the traditional through-hole metallization process will easily cause problems such as metal peeling and fracture in the through-hole when the bending angle reaches a certain level; while the packaging structure obtained through 3D, inkjet and other printing technologies, such as figure 1 As shown, the wires 30 are directly printed along the wall of the through hole 11 and respectively connected to the circuit wiring on the substrate 10 ( figure 1 not shown in ) and the pad 21 of the chip 20, this structure will cause the conductive performance of the wire 30 on the through hole 11 to be unstable due to factors such as gravity and bonding force of the wire 30 on the hole wall of the through hole 11 , and when it is greatly bent, a large amount of strain will be generated at the contact point between the chip 20 and the substrate 10, which will easily cause the wire 30 to break, peel off, etc.
[0003] Therefore, the existing traditional through-hole metallization process and 3D, inkjet and other printing technologies have the problem of low electrical connection reliability in the chip interconnection packaging structure.

Method used

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  • Chip interconnection packaging method and interconnection packaging structure
  • Chip interconnection packaging method and interconnection packaging structure
  • Chip interconnection packaging method and interconnection packaging structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0053] (1) Laser drilling: laser drilling, the prepared through hole 110 has an inner diameter of 65 μm and a depth of 50 μm;

[0054] (2) Preparation of multi-layer ladder 310: Yiligao URC-TDS has a viscosity of 500 mPas as the material for preparing multi-layer ladder 310, and its viscosity is 500 mPas. One layer of steps, the first step has a width of 20 μm and a height of 20 μm;

[0055](3) Curing molding: curing at 120°C for 60 minutes;

[0056] (4) Preparation of multi-layer ladder 310: Elektro URC-TDS is used as the material for preparing multi-layer ladder 310, and its viscosity is 120 mPas. The second layer of ladder is printed by inkjet printing equipment, and the width of the second layer of ladder is 15 μm. The height is 15 μm;

[0057] (5) Curing molding: curing at 120°C for 60 minutes;

[0058] (6) Preparation of multi-layer ladder 310: Elektro URC-TDS is used as the material for preparing multi-layer ladder 310, and its viscosity is 120 mPas. The third layer ...

Embodiment 2

[0067] (1) Laser drilling: laser drilling, the prepared through hole 110 has an inner diameter of 150 μm and a depth of 100 μm;

[0068] (2) Preparation of multi-layer ladder 310: Elektro URC-TDS is used as the material for preparing multi-layer ladder 310, its viscosity is 120mPas, the printing equipment is SIJ SuperInkjetPrinter printer, and the first layer of ladder is printed by inkjet printing through the printing equipment, the second A step width of 60 μm and a height of 20 μm;

[0069] (3) Curing molding: curing at 120°C for 60 minutes;

[0070] (4) Preparation of multi-layer ladder 310: Elektro URC-TDS is used as the material for preparing multi-layer ladder 310, and its viscosity is 120 mPas. The second layer of ladder is printed by inkjet printing equipment, and the width of the second layer of ladder is 40 μm. The height is 20 μm;

[0071] (5) Curing molding: curing at 120°C for 60 minutes;

[0072] (6) Preparation of multi-layer ladder 310: Elektro URC-TDS is u...

Embodiment 3

[0085] (1) Laser drilling: laser drilling, the prepared through hole 110 has an inner diameter of 200 μm and a depth of 100 μm;

[0086] (2) Preparation of multi-layer ladder 310: CYCLOTENE3000 series BCB solution is used as the material for preparing multi-layer ladder 310, its viscosity is 10000mPas, the printing equipment is SIJ SuperInkjetPrinter printer, the first layer of ladder is printed by inkjet printing through the printing equipment, the first layer The step width is 80 μm and the height is 20 μm;

[0087] (3) Pre-curing molding: curing at 120°C for 5 minutes;

[0088] (4) Preparation of multi-layer ladder 310: CYCLOTENE3000 series BCB solution is used as the material for preparing multi-layer ladder 310, its viscosity is 10000mPas, the second layer of ladder is printed by inkjet printing equipment, the width of the second layer of ladder is 60μm, and the height is 20μm;

[0089] (5) Pre-curing molding: curing at 120°C for 5 minutes;

[0090] (6) Preparation of ...

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Abstract

The invention provides a chip interconnection packaging method and an interconnection packaging structure, which are suitable for a flexible electronic packaging technology. The chip interconnection packaging method comprises steps: the chip is firstly packaged in a substrate by embedding, a hole is then punched in the substrate to obtain a through hole, and a pad of the chip is exposed; a multi-level step is then printed at the included angle between the hole wall of the through hole and the chip; and a wire is finally printed on the surface of the multi-level step, the wire is respectively connected with the circuit wiring of the substrate and the pad of the chip, and chip inter-layer interconnection is realized. According to the chip interconnection packaging method and the interconnection packaging structure provided in the invention, the multi-level step is then printed at the included angle between the hole wall of the through hole and the chip, wire printing in the through holebecomes simpler and more reliable, instable conductive performance of the wire caused by factors such as the gravity and a bonding force can be avoided, the inter-layer interconnection reliability isimproved, and the electrical connection reliability of the chip interconnection packaging structure is thus improved.

Description

technical field [0001] The invention relates to the technical field of electronic packaging, in particular to a method for interconnecting and packaging chips and an interconnecting and packaging structure. Background technique [0002] As the next generation of electronic revolution, flexible electronics are widely used in electronic communication, medical and military fields. In the existing flexible electronic packaging technology, the interconnection packaging structure of chips used for interlayer interconnection can be obtained by using traditional through-hole metallization technology and printing technologies such as 3D and inkjet. However, the packaging structure obtained through the traditional through-hole metallization process will easily cause problems such as metal peeling and fracture in the through-hole when the bending angle reaches a certain level; while the packaging structure obtained through 3D, inkjet and other printing technologies, such as figure 1 A...

Claims

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Application Information

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IPC IPC(8): H01L23/31H01L23/49H01L21/56
CPCH01L23/3121H01L23/49H01L21/56H01L2224/18
Inventor 滕乙超魏瑀刘东亮
Owner 浙江荷清柔性电子技术有限公司
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