Lithium cobalt oxide composite film electrode and preparation method thereof
A composite film, lithium cobalt oxide technology, applied in battery electrodes, circuits, electrical components, etc., can solve problems such as unfavorable electrode energy density, increase, and hinder lithium ion transportation, and achieve improved cycle stability, promote transportation, The effect of increased conductivity
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Embodiment 1
[0033] Embodiment 1: a kind of lithium cobalt oxide composite film electrode and preparation method thereof, comprises the following steps:
[0034] (1) LiCoO 2 The target and the Al target are installed in the magnetron sputtering chamber, and the vacuum is continuously pumped. The clean stainless steel substrate is placed in the substrate holder and heated to 550°C and maintained. The substrate rotation speed is 10rpm;
[0035] (2) Vacuum to the bottom vacuum 6×10 -4 After Pa, after passing Ar gas, the sputtering pressure is 2.5Pa, and the co-sputtering of LiCoO 2 target and Al target, of which LiCoO 2Target parameters are: target base distance 5cm, sputtering power 160W, Al target parameters are: target base distance 6.5cm, sputtering power 20W;
[0036] (3) Cool naturally after sputtering to obtain a lithium cobalt oxide composite thin film electrode.
Embodiment 2
[0037] Embodiment 2: a kind of lithium cobalt oxide composite film electrode and preparation method thereof, comprises the following steps:
[0038] (1) LiCoO 2 The target and the Al target are installed in the magnetron sputtering chamber, and the vacuum is continuously pumped. The clean stainless steel substrate is placed in the substrate holder and heated to 550°C and maintained. The substrate rotation speed is 10rpm;
[0039] (2) Vacuum to the bottom vacuum 6×10 -4 After Pa, a mixed gas of argon and oxygen is introduced, wherein the volume ratio of argon and oxygen is 4:1, so that the sputtering pressure is adjusted to 2.5Pa, and the co-sputtering of LiCoO 2 target and Al target, of which LiCoO 2 Target parameters are: target base distance 5cm, sputtering power 160W, Al target parameters are: target base distance 6.5cm, sputtering power 20W;
[0040] (3) Cool naturally after sputtering to obtain a lithium cobalt oxide composite thin film electrode.
Embodiment 3
[0041] Embodiment 3: a kind of lithium cobalt oxide composite film electrode and preparation method thereof, comprises the following steps:
[0042] (1) LiCoO 2 The target and the Al target are installed in the magnetron sputtering chamber, and the vacuum is continuously pumped. The clean stainless steel substrate is placed in the substrate holder and heated to 500°C and maintained. The substrate rotation speed is 10rpm;
[0043] (2) Vacuum to the bottom vacuum of 7×10 -4 After Pa, after passing Ar gas, the sputtering pressure is 2.5Pa, and the co-sputtering of LiCoO 2 target and Al target, of which LiCoO 2 Target parameters are: target base distance 6cm, sputtering power 200W, Al target parameters are: target base distance 7cm, sputtering power 30W;
[0044] (3) Cool naturally after sputtering to obtain a lithium cobalt oxide composite thin film electrode.
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