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A kind of biosensor based on dielectric nanoantenna, preparation method and application

A biosensor and nanoantenna technology, applied in nanomedicine, nanotechnology for sensing, nanotechnology, etc., can solve the problems of low extinction coefficient and no high refractive index, achieve low thermal effect, enhance interaction, improve The effect of sensitivity

Inactive Publication Date: 2021-02-19
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In summary, there is currently no high-sensitivity mid-infrared nano-lightwave antenna sensor made of high-refractive index, low extinction coefficient dielectric materials (such as germanium, silicon, tellurium, and lead-containing compounds of the four and six groups)

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  • A kind of biosensor based on dielectric nanoantenna, preparation method and application
  • A kind of biosensor based on dielectric nanoantenna, preparation method and application
  • A kind of biosensor based on dielectric nanoantenna, preparation method and application

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Embodiment Construction

[0028] The specific implementation of the present invention will be described in detail below in conjunction with the accompanying drawings: the case of this embodiment is based on the micro-nano process technology proposed by the present invention, but the scope of protection of the present invention is not limited to the following embodiments and cases; The electron beam lithography process can also be used, and other lithography techniques can also be used. At the same time, the dielectric material used in this case is not limited to germanium, but also silicon, germanium, tellurium, and lead-containing compounds of the four and six groups.

[0029] In this case, an electron beam lithography (EBL) process is used. The sample was etched to obtain a germanium disk with a period of 4500nm, the same horizontal and vertical periods, a diameter of 2650nm and a thickness of 280nm on the calcium fluoride substrate. The actual structure can be observed under the electron microscope ...

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Abstract

The invention discloses a biosensor based on a dielectric nano-antenna, which includes a substrate and a dielectric material arranged in a periodic array on the substrate, and the dielectric material is selected from silicon, germanium, tellurium and lead-containing compounds of the four and six groups. one or more. The invention has relatively low intrinsic loss, exhibits invariance in response to wide-ranging angle changes for certain structures such as cube arrays, has good compatibility, low loss, and can realize resonance with a high quality factor, thereby improving sensing sensitivity. The low loss feature can enhance the local field while avoiding the destruction of the molecules to be tested due to the strong photothermal effect. Moreover, the control of the radiation direction can be realized by adjusting the electrical resonance and magnetic resonance coupling of the designed structure, which is conducive to improving the collection efficiency and thus the sensing sensitivity. Dielectric nano-lightwave antennas have become a major tool for manipulating light at the nanoscale, enabling the regulation of far-field radiation.

Description

technical field [0001] The invention belongs to the technical field of sensor design, and specifically designs a biological sensor based on a dielectric nano-antenna, a preparation method and an application. Background technique [0002] In the field of micro-nano processing, with the gradual maturity of "top-down" nano-processing technologies such as electron beam etching and focused ion beam etching, the experimental fabrication of nano-lightwave antennas has gradually become possible, which has attracted the interest of many researchers. [0003] Infrared spectroscopy is playing an increasingly important role in the field of biosensing for material identification by detecting atomic vibrations in a wide range of molecular species and compounds. In the identification of biological materials, Fourier transform infrared spectroscopy (FTIR) has been widely used in molecular fingerprinting due to its fast, non-destructive, and high-sensitivity advantages. However, the typical...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/552G01N21/35B82Y40/00B82Y5/00B82Y15/00
CPCG01N21/35G01N21/554G01N2021/3595
Inventor 李强周焕刘楚明吕俊仇旻
Owner ZHEJIANG UNIV
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