A kind of biosensor based on dielectric nanoantenna, preparation method and application
A biosensor and nanoantenna technology, applied in nanomedicine, nanotechnology for sensing, nanotechnology, etc., can solve the problems of low extinction coefficient and no high refractive index, achieve low thermal effect, enhance interaction, improve The effect of sensitivity
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[0028] The specific implementation of the present invention will be described in detail below in conjunction with the accompanying drawings: the case of this embodiment is based on the micro-nano process technology proposed by the present invention, but the scope of protection of the present invention is not limited to the following embodiments and cases; The electron beam lithography process can also be used, and other lithography techniques can also be used. At the same time, the dielectric material used in this case is not limited to germanium, but also silicon, germanium, tellurium, and lead-containing compounds of the four and six groups.
[0029] In this case, an electron beam lithography (EBL) process is used. The sample was etched to obtain a germanium disk with a period of 4500nm, the same horizontal and vertical periods, a diameter of 2650nm and a thickness of 280nm on the calcium fluoride substrate. The actual structure can be observed under the electron microscope ...
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