Poly (monochloro-p-xylene)-based membrane resonance type gas sensor and detection system

A technology of gas detection system and gas sensor, which is applied in the direction of instruments, measuring devices, scientific instruments, etc., can solve the problems that long-distance telemetry and high-sensitivity detection cannot be realized at the same time, and achieve the effect of reducing volume and simplifying structure

Active Publication Date: 2019-10-18
DALIAN UNIV OF TECH
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Problems solved by technology

[0004] The purpose of the present invention is to propose a diaphragm resonance miniaturized gas sensor and detection system based on polychlorop-xylylene, aiming to solve the problem that the traditional photoacoustic spectroscopy gas detection system cannot simultaneously realize long-distance telemetry and high-sensitivity detection , which expands a larger space for the application of photoacoustic spectroscopy detection technology in the field of long-distance telemetry of trace gases

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  • Poly (monochloro-p-xylene)-based membrane resonance type gas sensor and detection system
  • Poly (monochloro-p-xylene)-based membrane resonance type gas sensor and detection system
  • Poly (monochloro-p-xylene)-based membrane resonance type gas sensor and detection system

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[0015] The specific implementation manners of the present invention will be further described below in conjunction with the accompanying drawings and technical solutions.

[0016] The present invention provides such figure 1 The Parylene-C-based diaphragm resonance gas sensor shown includes a single-mode optical fiber 1 , an F-P cavity 2 , a Parylene-C membrane 3 , a vent hole 4 and a housing 5 . The F-P cavity 2 is not only the cavity of the F-P interferometer, but also a miniature non-resonant photoacoustic cell for generating photoacoustic signals. The gas to be measured enters the F-P cavity 2 through the air hole 4, and the photoacoustic signal generated by the photoacoustic effect of the gas causes the periodic vibration of the Parylene-C membrane 3. The diameter of the Parylene-C film 3 is 9 mm, and the thickness is 800 nm. At this time, the resonance frequency of the F-P interferometer is about 30 Hz.

[0017] figure 2 Shown is a schematic diagram of the detection ...

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Abstract

The invention belongs to the technical field of optical fiber sensing and trace gas detection, and relates to a poly(monochloro-p-xylene)-based membrane resonance type gas sensor and a detection system. The gas sensor adopts a structure of an F-P interferometer; and an F-P cavity of the F-P interferometer is also a non-resonance photoacoustic tank a photoacoustic system. Parylene-C has relativelylow young modulus and relatively large elongation at break, so that a Parylene-C membrane prepared through a vacuum vapor phase polymerization deposition has the characteristics of strong coating property and high deposition uniformity; therefore Parylene-C membrane prepared through the vacuum vapor phase polymerization deposition has the characteristics of large radius and thin thickness. The inherent resonance frequency of the F-P interferometer is in direct proportion to the thickness of the diaphragm and is inversely proportional to the square of the radius of the diaphragm, so that the resonance frequency of the F-P interferometer can be as low as several tens of hertz. The invention provides a novel technical means for high-sensitivity long-distance gas telemetering in a narrow space.

Description

technical field [0001] The invention belongs to the technical field of optical fiber sensing and trace gas detection, and relates to a membrane resonant gas sensor and a detection system based on poly(monochlorop-xylene). Background technique [0002] Trace gas detection has a wide range of application requirements in the fields of atmospheric environment detection, industrial process control and life sciences. With the development of laser technology, spectroscopic technology has become a gas detection method with the advantages of high sensitivity, fast response time and strong selectivity. Photoacoustic spectroscopy is a spectral calorimetry technique that directly measures the heat energy produced by a substance due to the absorption of light energy. In the closed photoacoustic cell, gas molecules are excited to a high-energy state due to the absorption of light of a specific wavelength. The collision between the high-energy state molecules makes some excited molecules ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/17G01N21/01
CPCG01N21/01G01N21/1702G01N2021/1704
Inventor 宫振峰陈烨伟高田力于清旭
Owner DALIAN UNIV OF TECH
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