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Wide-spectrum micro-nano fiber-coupled superconducting nanowire single-photon detector and preparation method thereof

A single-photon detector and superconducting nanowire technology, which is applied in the field of photoelectric detection, can solve the problems of complex preparation process, low detection efficiency, and small detection wavelength range, and achieve simple preparation process, high detection efficiency, and wide detection wavelength range Effect

Active Publication Date: 2021-06-18
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Aiming at the above-mentioned deficiencies in the prior art, the present invention proposes a wide-spectrum micro-nano fiber-coupled superconducting nanowire single-photon detector and its preparation method, which are simple, easy to implement, good in stability and strong in portability. The detectors in the prior art have problems such as small detection wavelength range, low detection efficiency and complicated preparation process.

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  • Wide-spectrum micro-nano fiber-coupled superconducting nanowire single-photon detector and preparation method thereof
  • Wide-spectrum micro-nano fiber-coupled superconducting nanowire single-photon detector and preparation method thereof
  • Wide-spectrum micro-nano fiber-coupled superconducting nanowire single-photon detector and preparation method thereof

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Embodiment 1

[0051] see figure 1, the present invention provides a wide-spectrum micro-nano fiber-coupled superconducting nanowire single-photon detector, the broad-spectrum micro-nano fiber-coupled superconducting nanowire single-photon detector comprising: a substrate 11; The superconducting nanowires 12 are located on the surface of the substrate 11; the superconducting nanowires 12 include several parallel and spaced straight line portions 121 and are located between adjacent straight line portions 121 so that each of the straight line portions 121 The parts 121 are connected end to end in turn to form a meandering connection part 122; wherein, the length L of the straight part 121 is between 100 μm and 200 μm; the micro-nano optical fiber 13, the micro-nano optical fiber 13 is located on the substrate, and Across the superconducting nanowire 12; optical glue 14, the optical glue 14 is located on the substrate 11, and is cured and coated on the periphery of the superconducting nanowire...

Embodiment 2

[0069] Please combine Figure 1 to Figure 5 refer to Image 6 , the present invention also provides a preparation method of a wide-spectrum micro-nano fiber-coupled superconducting nanowire single-photon detector, the preparation method of the broad-spectrum micro-nano fiber-coupled superconducting nanowire single-photon detector comprises the following steps:

[0070] 1) providing a substrate;

[0071] 2) forming superconducting nanowires on the surface of the substrate; the superconducting nanowires include a plurality of straight line portions arranged in parallel at intervals and located between adjacent straight line portions so that each of the straight line portions is sequentially arranged head to tail A connection part connected in a meandering shape; wherein, the length of the straight part is between 100 μm and 200 μm;

[0072] 3) forming a micro-nano fiber on the substrate, the micro-nano fiber spanning the superconducting nanowire;

[0073] 4) Obtain the range ...

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Abstract

The invention provides a wide-spectrum micro-nano fiber-coupled superconducting nanowire single-photon detector and a preparation method thereof, comprising: a substrate; superconducting nanowires located on the surface of the substrate; superconducting nanowires comprising several parallel spaced rows The straight line part of the cloth and the connecting part located between adjacent straight line parts to connect each straight line end to end in a zigzag shape; the length of the straight line part is between 100 μm and 200 μm; the micro-nano optical fiber is located on the substrate, and the horizontal across the superconducting nanowire; the optical glue is located on the substrate and is cured and coated on the periphery of the superconducting nanowire and the micro-nano fiber; the optical glue has a preset refractive index range to prevent incident light in the micro-nano fiber Leakage to optical glue and substrate. The wide-spectrum micro-nano fiber-coupled superconducting nanowire single-photon detector of the present invention can achieve a high light absorption rate for light with a wide range of wavelengths from visible light to near-infrared light, and has a wide detection wavelength range, high detection efficiency and structural Simple and other advantages.

Description

technical field [0001] The invention belongs to the technical field of photoelectric detection, and relates to a superconducting nanowire single-photon detector, in particular to a wide-spectrum micro-nano fiber-coupled superconducting nanowire single-photon detector and a preparation method thereof. Background technique [0002] Superconducting nanowire single photon detectors (SNSPDs) are widely used in quantum communication, time-of-flight ranging and imaging, and life medicine because of their excellent performance such as high detection efficiency, low time jitter, low dark count, and high count rate. , space communications and other fields. It has become a mainstream single-photon detector in recent years. [0003] Broad-spectrum performance is of great significance for SNSPD applications, such as atmospheric detection, bioluminescent detection, optical microscopy, and single-photon imaging. The energy of a single photon (~1eV) is much larger than the superconducting...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J1/42B82Y15/00B82Y20/00B82Y30/00B82Y40/00
CPCB82Y15/00B82Y20/00B82Y30/00B82Y40/00G01J1/42G01J2001/442
Inventor 侯昕彤尤立星李浩王镇
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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