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A kind of polishing liquid for kdp crystal and its preparation method, application

A polishing liquid and crystal technology, applied in grinding/polishing equipment, manufacturing tools, metal processing equipment, etc., can solve problems such as damage and surface atomization of KDP crystals, and achieve the effects of simple preparation, stable properties, and easy surface cleaning.

Active Publication Date: 2021-06-04
INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In chemical mechanical polishing, the polishing liquid is one of the cores of the entire technical process, and its physical and chemical properties directly affect the precision level of chemical mechanical polishing. If the traditional polishing liquid is used, it will cause atomization or damage to the KDP crystal surface

Method used

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  • A kind of polishing liquid for kdp crystal and its preparation method, application
  • A kind of polishing liquid for kdp crystal and its preparation method, application
  • A kind of polishing liquid for kdp crystal and its preparation method, application

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Effect test

Embodiment 1

[0040] The prepared polishing liquid is used for KDP crystal polishing, the specific process is:

[0041] 1) Obtaining the initial surface: the KDP crystal with a diameter of 50mm cut by single-point diamond is used as the crystal to be polished, and the surface roughness is 3.5nm;

[0042] 2) Preparation of polishing solution: mix the non-polar phase (cyclohexane) and the dual-solvent phase (isopropanol) according to a certain volume ratio, and after magnetically stirring evenly, add a certain volume of polar phase to the mixed solvent dropwise (water), the volume ratio of hexanaphthene, isopropanol and water in the final system is 36:604, leave standstill after stirring evenly, and seal up for subsequent use; In order to compare the advantages of the polishing solution of the present invention and the traditional water-in-oil microemulsion, we use The water-in-oil microemulsion formed in the ratio of oil phase (decanol), surfactant (TX-100) and water is 36:60:4 as the polish...

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Abstract

The invention discloses a polishing liquid for KDP crystals and its preparation method and application. The polishing liquid is composed of the following volume percentage components: polar phase: 1-10%; non-polar phase: 30%-55% %; The remainder is a two-solvent phase. The preparation method of the polishing liquid of the present invention is simple and stable in properties, and the flying cutter lines can be effectively removed under a relatively low polishing pressure (1-2.5kPa), avoiding subsurface damage that may be caused by high polishing pressure, etc. problems, and the surface roughness has been improved to a certain extent after polishing. The components of the polishing liquid are commonly used organic reagents and do not chemically react with KDP. The polishing liquid does not use amphiphilic surfactants. After polishing, only one of the components of the polishing liquid (dual solvent phase) is used for simple surface washing, that is The surface can be cleaned without any residue of impurities on the surface.

Description

technical field [0001] The invention relates to the technical field of microemulsion polishing fluid for ultra-precision machining, in particular to a polishing fluid for KDP crystals and a preparation method and application thereof. Background technique [0002] Potassium dihydrogen phosphate (KDP) crystal is a very good nonlinear optical element, and it is currently the only nonlinear optical material that can be used for laser frequency doubling, electro-optic modulation and photoelectric switching devices in optical systems such as ICF and strong laser weapons. In engineering applications, the surface quality requirements of KDP crystals are extremely high, such as ultra-smoothness, no surface defects, no stress residues, and no impurity residues, which are close to the limit of material processing. However, the KDP crystal material itself is soft and brittle, easy to deliquescence, sensitive to temperature changes, and anisotropic, which makes processing KDP crystals ex...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C09G1/04B24B57/02
CPCB24B57/02C09G1/04
Inventor 董会潘金龙郭亮龙黄姝珂王超王利利李晓媛叶敏恒
Owner INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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