A polishing device and method based on confocal megasonic micro-jet

A polishing device and megasonic wave technology are applied in the field of optical component processing and ultra-precision optical surface processing, which can solve the problems of large surface energy, small nozzle hole size, affecting polishing quality, etc. Time response characteristics, effect of suppressing agglomeration effect

Active Publication Date: 2021-06-04
成都精密光学工程研究中心
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although jet polishing has the above advantages, since the polishing powder particles are nano-sized and have a large surface energy, during the process of pressure-driven jet formation, the polishing powder particles tend to agglomerate, which will affect the polishing quality; in addition, in order to obtain a more ideal removal efficiency , the size of the nozzle holes of traditional jet polishing is small, which is easy to cause clogging

Method used

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  • A polishing device and method based on confocal megasonic micro-jet
  • A polishing device and method based on confocal megasonic micro-jet
  • A polishing device and method based on confocal megasonic micro-jet

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Embodiment 1

[0034] The invention discloses a confocal megasonic wave micro-jet polishing scheme. The polishing scheme mainly realizes the polishing of optical elements through the micro-jet excited by the megasonic wave and the particle resonance effect, especially utilizes the emitted megasonic wave to form a liquid storage chamber. The polishing liquid inside is the propagation medium, passes through the cavity and the nozzle, and finally focuses on a point outside the nozzle; when performing processing work, the focus of the megasonic wave is placed near the surface of the processed component for polishing.

[0035] Embodiment 1 is a kind of micro-jet polishing device based on confocal megasonic wave, such as figure 1 Shown is a schematic diagram of the central section structure of the polishing device, which includes a top cover 1, a megasonic transducer 2, a transducer cluster seat 3, a connecting seat 4, a liquid storage chamber 5, a sealing ring 6, and a nozzle 7. The nozzle 7 is p...

Embodiment 2

[0038] Such as figure 2 As shown, it is a three-dimensional view of the transducer cluster seat 3 in the confocal megasonic micro-fluidic polishing device. There are several transducer mounting holes for installing megasonic transducers on the transducer cluster seat 3, the number of transducer mounting holes is greater than or equal to the number of megasonic transducers used, which is Since the number of megasonic transducers actually used needs to be selected according to actual use requirements, the number of megasonic transducers can be determined according to actual needs and fixedly installed on the transducer cluster seat 3. inside the hole. In actual work, the operating frequency and power of the megasonic transducer can be adjusted through hardware or software, and the overall operating frequency and power of the transducer can be controlled by controlling the transducer driver.

[0039] for image 3 For the transducer cluster seat 3 shown under an angle, its upp...

Embodiment 3

[0043] In the confocal megasonic-based micro-jet polishing device, the polishing liquid 8 is a liquid medium for transmitting megasonic energy, such as a stainless steel polishing liquid. In other embodiments, the polishing liquid 8 can also be other liquids that can achieve the same function. In actual operation, the liquid storage chamber must be filled with the polishing liquid 8 to serve as a conduction medium for megasonic waves.

[0044] Such as Figure 4 Shown is the schematic diagram of the transducer and its focus, the polishing fluid 8 is focused on a point outside the end face of the transducer by the megasonic wave sent by the megasonic transducer in the foregoing embodiment, and this point is the focus of the transducer, And this point has the maximum megasonic sound field intensity, and at the same time the polishing fluid exhibits the maximum jet velocity at this point.

[0045] Such as Figure 5 As shown, the overall three-dimensional view of the confocal meg...

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Abstract

The invention discloses a polishing device and method based on confocal megasonic micro-jet, belonging to the field of ultra-precision optical surface processing. The polishing device includes a top cover, a megasonic transducer, a transducer cluster seat, a connecting seat, a liquid storage chamber, a sealing ring, and a nozzle, and the nozzle is provided with a small hole for ejecting the polishing liquid. In addition to the advantages of traditional jet polishing, the confocal megasonic wave micro-jet polishing device and method can suppress the agglomeration effect of polishing powder particles and improve Suspension and dispersion of the polishing liquid; in addition, compared with traditional jet polishing, the device and method have more controllable parameters, and different polishing spots can be realized by adjusting the power and frequency parameters of the megasonic transducer array , polishing efficiency, polishing quality, and has good time response characteristics.

Description

technical field [0001] The invention belongs to the field of optical element processing, and in particular relates to a polishing device and method based on confocal megasonic micro-jet, which is especially suitable for the fine polishing stage of optical elements, and also belongs to the field of ultra-precision optical surface processing. Background technique [0002] Ultra-precision machining is one of the important indicators of the national manufacturing technology level. The precision, surface roughness, processing size range and geometric shape that can be achieved by ultra-precision machining directly determine the height that the manufacturing industry can achieve. In addition, ultra-precision machining is also an important pillar of advanced manufacturing technology and intelligent manufacturing technology. In the field of optics, the caliber and surface precision of optical components directly determine the performance of the optical system, and the ultra-precisio...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24C1/08B24C9/00
CPCB24C1/08B24C9/00
Inventor 赵恒蔡超何祥马平鄢定尧黄金勇王刚谢磊胡庆蔡红梅鲍振军李智钢卢忠文崔建朋朱衡高胥华
Owner 成都精密光学工程研究中心
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