A diffusion process debugging method that can improve the over-temperature phenomenon of a low-pressure diffusion furnace

Abstract

The invention discloses a diffusion process debugging method that can improve the overtemperature phenomenon of a low-pressure diffusion furnace. By performing stepwise debugging on the preset temperature of the process steps of the low-pressure diffusion furnace, the time for each temperature zone in the diffusion furnace to rise to the target temperature is shortened. , and control the non-furnace mouth temperature zone will not exceed the target temperature. The present invention adopts multi-step stepwise temperature rise, reduces the temperature rise slope of the second temperature zone and the third temperature zone, improves over-temperature phenomenon, improves temperature control, thereby improves the stability of the process SPC, greatly shortens the entire temperature rise process time, and improves the Temperature stability saves time, improves productivity and process stability.

Description

technical field [0001] The invention relates to the field of low-pressure diffusion technology, in particular to a diffusion process debugging method that can improve the overtemperature phenomenon of a low-pressure diffusion furnace. Background technique [0002] At present, the low-pressure diffusion furnace has the advantages of high uniformity, high production capacity, and low consumption. The low-pressure diffusion furnace can produce high-quality solar cells at low cost and small footprint. A whole new standard is set. As the market grows to mature and then declines, "cost reduction and efficiency increase" is an inevitable requirement for market development. Therefore, a large number of production capacity is increased to reduce unit cost. In addition to the heating capacity required by the diffusion furnace design, we research on shortening the heating time method to reduce the overall process time and increase production capacity. [0003] The currently used low-...

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Problems solved by technology

As a result, the second half of the heating time of the entire process is spent in cooling in the middle temperature zone of the furnace, and the subsequent process steps are carried out after the temperature is lowered to the set temperature of diffusion deposition, which greatly wastes the process time

[0005] The diffusion process steps of the Jiejia Weichuang low-pressure diffusion furnace in the prior art are shown in the attached manual. figure 1 As shown, the defect of the current Jiejia Weichuang low-pressure diffusion furnace is: in the whole three-step heating process, the temperature is raised first, but the temperature loss at the furnace mouth of the diffusion furnace is the largest, so the temperature rises the slowest. When the temperature in other temperature zones reaches The mouth is still heating up at full power, which causes the temperature zone of the furnace mouth to affect the temperature of the middle temperature zone of the furnace, resulting in overheating of the middle temperature zone of the furnace; so the second half of the heating process is actually the middle temperature zone of the furnace is cooling down, resulting in a longer process time. long

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