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Acousto-optic deflector device for improving laser scanning angle

An acousto-optic deflector, laser scanning technology, applied in instruments, optics, nonlinear optics, etc., can solve the problems of difficult to meet the scanning requirements of large angles, small scanning angles, etc., to achieve low power consumption, low operating voltage, scanning fast frequency effect

Active Publication Date: 2019-08-16
CHINA ELECTRONICS TECH GRP NO 26 RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Acousto-optic scanning achieves the deflection of incident light through the acousto-optic effect of crystals, and has significant advantages in volume, light intensity control, scanning frequency and scanning accuracy, but the scanning angle is small, and it is difficult to meet the scanning requirements of large angles

Method used

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  • Acousto-optic deflector device for improving laser scanning angle
  • Acousto-optic deflector device for improving laser scanning angle
  • Acousto-optic deflector device for improving laser scanning angle

Examples

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Embodiment 1

[0032] Such as figure 1 As shown, a two-stage acousto-optic deflector assembly of the present invention includes a housing 1, a mounting plate 18 and a buffer layer 19 are installed in the housing 1, and an acousto-optic deflector 8, an acousto-optic deflector 8, and an acousto-optic deflector A deflector 10 , an acousto-optic modulator 11 and a fiber collimator 21 .

[0033] Among them, the acousto-optic deflector 8 is mainly composed of the acousto-optic medium 3, the bonding layer 4, the transducer 5, the surface electrode 6, the matching network 7, the high-frequency socket 9, the screw 24 and the fixing plate 25; A fixed plate 25 is connected below the optical medium 3, and the acousto-optic medium 3 is fixed on the mounting plate by screws 24 on the fixed plate 25; a bonding layer 4 is connected above the acousto-optic medium 3; A transducer 5 is installed above the 4; the acousto-optic medium 3 is connected to the meter electrode 6 through the transducer 5, and a match...

Embodiment 2

[0046] Such as figure 2 As shown, the present embodiment provides a three-stage AOD assembly, including a housing 1, a mounting plate 18 and a buffer heat dissipation layer 19 are installed in the housing 1, and an AOD 8, an acoustic Optical deflector 10 , acousto-optic deflector 26 , acousto-optic modulator 11 , acousto-optic modulator 27 and fiber collimator 21 . Compared with the 2-stage AOD assembly, the 3-stage AOD assembly adds an AOD 26 and an AOM 27 .

[0047] The AOD 8, the AOD 10 and the AOD 26 are all designed according to the theory of anomalous AOD, so the diffracted light can obtain a larger scanning angle. Through precise design and processing, the scanning angles of the three AODs can all be θ 0 .

[0048] The working principle of the AOD 8, the AOD 10 and the AOM 11 is the same as that of the 2-stage AOD assembly.

[0049] The working principle of the acousto-optic modulator 27 is: the radio frequency signal is input from the high-frequency socket, and th...

Embodiment 3

[0055] Such as image 3 As shown, this embodiment provides a two-way two-stage fiber optic AOD assembly, including a split fiber switch 31 , a two-stage AOD assembly 32 and a two-stage AOD assembly 33 . The optical fiber switch 31 divides the light into two paths: light splitting 34 and light splitting 35 . The split light 34 is deflected and scanned by the two-stage acousto-optic deflector assembly 32, and the scanning angle is θ 8 , θ 8 = 2θ 0 . The split light 35 is deflected and scanned by the two-stage acousto-optic deflector assembly 33, and the scanning angle is θ 9 , θ 9 = 2θ 0 . The total scan angle of this 2-stage fiber AOD assembly is θ 9 +θ 8 = 2θ 0 +2θ 0 =4θ 0 , Compared with the ordinary single acousto-optic deflector, the scanning angle is increased by 3 times.

[0056] Among them, as a realizable way, if the optical fiber switch 31 is divided into n channels, then it needs to be connected with n 2-stage acousto-optic deflector components. At this t...

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Abstract

The invention relates to the technical field of optical devices, and especially relates to an acousto-optic deflector device for improving a laser scanning angle. The acousto-optic deflector device comprises an N-level acousto-optic deflector assembly; the N-level acousto-optic deflector assembly comprises a shell, and a mounting plate is arranged on the shell; and the mounting plate is equipped with N acousto-optic deflectors, N-1 acousto-optic modulators and one optical fiber collimator which are sequentially connected with each other. According to the acousto-optic deflector device for improving the laser scanning angle provided by the invention, the acousto-optic deflector is cascaded, so that the scanning angle of the laser is improved manyfold, and the requirements of large-angle, high-precision and fast scanning can be met.

Description

technical field [0001] The invention relates to the technical field of optical devices, in particular to an acousto-optic deflector for laser scanning, in particular to an acousto-optic deflector device for increasing the laser scanning angle. Background technique [0002] Laser beam deflection scanning has been used more and more in the fields of semiconductor processing, military detection, aerospace, biomedicine, and nanoscience research. At present, laser beam deflection scanning mainly includes mechanical scanning, piezoelectric ceramic reflection scanning, acousto-optic scanning and electro-optic scanning. [0003] Mechanical scanning uses the principle of geometric optics to deflect the beam through the rotation of the mirror. It has the advantages of large scanning angle and high energy utilization. However, it is restricted by defects such as large volume, low scanning frequency, and low scanning accuracy. It is difficult to apply in the occasion of specialized and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/33
CPCG02F1/33
Inventor 张泽红陈永峰吴中超朱吉周益民
Owner CHINA ELECTRONICS TECH GRP NO 26 RES INST
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